Development of a compact ultra-precision six-axis hybrid micro-machine

High precision miniature and micro products which possess 3D complex structures or free-form surfaces are now widely used in industries. These micro products are usually fabricated by several machining processes in order to apply for various materials such as hard-to-machine steel and ceramic etc. The integration of these machining processes onto one machine becomes necessary since this will help reduce realignment errors and also increase the machining efficiency. In this research, an ultra-precision hybrid micro-machine which is capable of micro milling, micro grinding, micro turning, laser machining and laser assisted micro-machining has been designed and commissioned. Control software for on-machine metrology system (contact probe and dispersed reference interferometry (DRI)) and several plug-in modules including camera and handle system are integrated through a customised human-machine interface (HMI)