A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 μm

The increasing demand for accurate coordinate measurements on products demands new concepts of probe design. Results of some realized designs will be given. One of the most promising utilizes microtechnology and etching in silicon in order to realize the necessary dimensional design with flexure hinges. Microtechnology is also used for the detection system; strain gages are integrated in the probe. Results for two probes will be given and possible future developments will be discussed

Deformation and wear of pyramidal, silicon-nitride AFM tips scanning micrometre-size features in contact mode

An experimental study was carried out, in order to investigate the deformation and wear taking place on pyramidal silicon-nitride AFM tips. The study focuses on the contact mode scanning of silicon features of micrometre-size. First the deformation and the mechanisms of wear of the tip during scanning are discussed. After that the results of an experiment showing both phenomena on a used AFM tip are presented. Both the damaged and the unused tip are shown on AFM and SEM images. Using these images the actual mechanisms of wear are determined. It is shown that adhesive wear, low cycle fatigue and plastic deformation take place on the tip

Design for precision : current status and trends

Design for Precision’ reviews the status quo in Precision Engineering and concludes that today's precision engineers put repeatability at the top of their list. The design rules, patterns or principles, quoted here from various authors, are all time-proven insights, to get reproducible results with ultra precision machines and instruments. Modelling and analysis of different concepts, systems, and components is required to adapt the progressing design or to confirm its adequacy. Expenditure on such analysis is worthwhile to avoid realisation of an inadequate design. However, creativity is more important in keeping the cost down by finding other than locally optimised solutions. World-wide, precision engineers agree on design principles, the challenge is to apply them creatively to obtain a thought-out design. In today's most accurate machines, advanced techniques are applied for compensation of e.g. residual geometric errors, errors caused by machine dynamics, or thermo-mechanically induced errors. Future developments in Precision Engineering require nanometre- or even subnanometre positioning-and measuring accuracy, demanding new design concepts with integrated control and error compensation systems

Design for precision : current status and trends

Design for Precision’ reviews the status quo in Precision Engineering and concludes that today's precision engineers put repeatability at the top of their list. The design rules, patterns or principles, quoted here from various authors, are all time-proven insights, to get reproducible results with ultra precision machines and instruments. Modelling and analysis of different concepts, systems, and components is required to adapt the progressing design or to confirm its adequacy. Expenditure on such analysis is worthwhile to avoid realisation of an inadequate design. However, creativity is more important in keeping the cost down by finding other than locally optimised solutions. World-wide, precision engineers agree on design principles, the challenge is to apply them creatively to obtain a thought-out design. In today's most accurate machines, advanced techniques are applied for compensation of e.g. residual geometric errors, errors caused by machine dynamics, or thermo-mechanically induced errors. Future developments in Precision Engineering require nanometre- or even subnanometre positioning-and measuring accuracy, demanding new design concepts with integrated control and error compensation systems