79 research outputs found
Interactions between Plants and Epiphytic Bacteria Regarding Their Auxin Metabolism. VIII. Transfer of 14C-Indoleacetic Acid from Epiphytic Bacteria to Corn Coleotiles
No full textInteractions between Plants and Epiphytic Bacteria Regarding Their Auxin Metabolism. VII. The Influence of the Epiphytic Bacteria on the Amount of Diffusible Auxin from Corn Coleoptiles
No full textNachweis von Indol-3-brenztraubens�ure und Indol-3-�thanol (Tryptophol) bei der enzymatischen Auxinbildung aus Tryptophan in vitro
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Structural determination of a 1/1 rational approximant to the icosahedral phase in Ti-Cr-Si alloys
Full text linkPathways of IAA Production from Tryptophan by Plants and by Their Epiphytic Bacteria: A Comparison. III. Metabolism of Tryptamine, Indolacetaldehyde, Indoleethanol and Indoleacetamide, Effects of a Native Inhibitor
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BEOL Solvent Clean Process Study Using Fluoride Containing and Hydroxylamine Based Stripper
Full text linkSolvent clean is a critical process for BEOL post Etch/Asher residue removal technology in AlCu device. Well-controlled metal galvanic corrosion, smooth metal sidewall, metal corrosion prevention before dielectric deposition and free polymer residue remaining are basic requirements of solvent clean process. In this paper, solvent clean process was studied in detail using one fluoride containing stripper and a typical hydroxylamine (HDA) based stripper by the pattern wafers of 0.15um and 0.18um node technology. Those key parameters, including residue removal performance, pattern profile, defectivity, resistivity and reliability, were evaluated. The data showed process optimization was necessary to achieve comparable performance from the stripper's intrinsic property points of view.</jats:p
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