Implantable RF-coiled chip packaging

In this paper, we present an embedded chip integration technology that utilizes silicon housings and flexible parylene radio frequency (RF) coils. As a demonstration of this technology, a flexible parylene RF coil has been integrated with an RF identification (RFID) chip. The coil has an inductance of 16 μH, with two layers of metal completely encapsulated in parylene-C. The functionality of the embedded chip is verified using an RFID reader module. Accelerated-lifetime soak testing has been performed in saline, and the results show that the silicon chip is well protected and the lifetime of our parylene-encapsulated RF coil at 37 °C is more than 20 years

A MEMS electrostatic particle transportation system

We demonstrate here an electrostatic MEMS system capable of transporting particles 5-10μm in diameter in air. This system consists of 3-phase electrode arrays covered by insulators (Figs. 1, 2). Extensive testing of this system has been done using a variety of insulation materials (silicon nitride, photoresist, and Teflon), thickness (0- 12μm), particle sizes (1-10μm), particle materials (metal, glass, polystyrene, spores, etc), waveforms, frequencies, and voltages. Although previous literature [1-2] claimed it impractical to electrostatically transport particles with sizes 5-10μm due to complex surface forces, this effort actually shows it feasible (as high as 90% efficiency) with the optimal combination of insulation thickness, electrode geometry, and insulation material. Moreover, we suggest a qualitative theory for our particle transportation system which is consistent with our data and finite-element electrostatic simulations

A micro cell lysis device

A new micromachined cell lysis device is developed. It is designed for miniature bio-analysis systems where cell lysing is needed to obtain intracellular materials for further analysis such as DNA identification. It consists of muti-electrode pairs to apply electric fields to cells. We adopt the means of using electric field lysing because it can greatly simplify purification steps for preparation of biological samples, when compared to conventional chemical methods. Yeast, Chinese cabbage, radish cells and E. coli are tested with the device. The lysis of yeast, Chinese cabbage, radish cells is observed by a microscope. The experimental observation suggests E. coli are also lysed by the pulsed electric field. The range of electric field for the lysis is on the order of 1 kV/cm to 10 kV/cm. In addition, for practical reasons, we reduce the voltage required for lysing to less than 10 V by making the electrode gap on the order of microns

Electrolysis-based Parylene Balloon Actuators for Movable Neural Probes

In order to track a specific neuron and keep good sampling neural signals during chronic implantation, the neural probes are highly desired to have moving capability. This paper presents a novel electrolysis-based parylene balloon actuator fabricated with MEMS technology. The actuator is integrated with silicon probe to make it movable. A new fabrication technology has been developed to build a parylene balloon structure with silicon spring structure, electrolysis electrodes and electrolyte inside. By applying little current to electrolysis electrodes, high pressure is generated inside the parylene balloon by electrolysis. The spring structure is stretched with the parylene balloon expansion. Therefore the neural probe is moved by the actuation. The electrolysis actuator can generate large stain and pressure, requires modest electrical power and produces minimal heat. Due to the large volume expansion obtained via electrolysis, the small actuator can create a large force. The new electrolysis actuators for movable neural probes have been fabricated and validated

Corrosion Behavior of Parylene-Metal-Parylene Thin Films in Saline

In this paper, we study the corrosion behavior of parylene-metal-parylene thin films using accelerated-lifetime soak tests. The samples under test are thin film resistors with a 200 nm layer of Au sandwiched by parylene-C on both sides, fabricated with parylene-metal skin technology. The samples are tested in hot saline both passively and actively, and different failure modes are observed using optical and electron-beam metrologies. Bubbles and delamination are first seen in the samples after 2 days of soaking under passive conditions, and followed by metal corrosion. While under active conditions, either bubbles or parylene breakdowns are observed depending on the thickness of parylene packaging. These results contribute to a better understanding of the failure mechanisms of parylene packaging in body fluids

Electrolysis-based diaphragm actuators

This work presents a new electrolysis-based microelectromechanical systems (MEMS) diaphragm actuator. Electrolysis is a technique for converting electrical energy to pneumatic energy. Theoretically electrolysis can achieve a strain of 136 000% and is capable of generating a pressure above 200 MPa. Electrolysis actuators require modest electrical power and produce minimal heat. Due to the large volume expansion obtained via electrolysis, small actuators can create a large force. Up to 100 µm of movement was achieved by a 3 mm diaphragm. The actuator operates at room temperature and has a latching and reversing capability