INVESTIGATION OF SHEATH AT ELECTRODE IN RADIO-FREQUENCY DISCHARGE

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EXPERIMENTAL INVESTIGATION OF RADIO-FREQUENCY DISCHARGE IN HELIUM

In paper /1/ it was noted that an increase in RF discharge voltage brought about a qualitative change in the discharge and in the discharge luminocity. In /2, 3/ it was shown that this change in regima (from α to γ) was accompanied by a sharp increase in the discharge current

ICP diagnostics with magnetic probes

Magnetic probe (B-dot) diagnostics of inductively coupled plasmas are reviewed in this lecture. The diagnostic fundamentals, the relationships between the measured B-dot signals and the rf electric fields and currents in an ICP, the design of B-dot experiment and the results of B-dot measurements carried out over a wide range of ICP parameters are discussed here. It is shown that commonly used B-dot probes enclosed in a dielectric shell significantly disturb the measured B-dot signals and may lead to erroneous results. Some new results on the electromagnetic field and rf current distribution measured in a cylindrical ICP with a flat inductor coil are discussed in terms of anomalous skin effect

THEORETICAL INVESTIGATION OF RADIO-FREQUENCY DISCHARGE IN γ- REGIME

The existence of two different regimes of RF discharge (α and β -regimes) was first mentioned in paper /1/. As the luminosity of the high voltage regime was observed to be similar to that of the glow discharge, the author /1/ put forward a hypothesis that secondary emission fram the electrodes ( β -proceas) plays an important role in this regime ( β -discharge). It is presumed that β -processes are negligible in the low voltage regime ( α - discharge)

FINITE THICKNESS EFFECT OF PROBE SHEATH IN RADIO-FREQUENCY PLASMA PROBE DIAGNOSTICS

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