КОНСТРУИРОВАНИЕ ГАЗОВЫХ МИКРОСИСТЕМ НА ОСНОВЕ НАНОПОРИСТОГО АНОДНОГО ОКСИДА АЛЮМИНИЯ

Influence of the porosity of anodic alumina substrate on basic characteristics of four gas sensor microsystem has been determined. Dependences of the tensor components of modulus of elasticity and thermalconductivity coefficients as a function of α-Al2O3 porosity obtained by FEA were utilized in the calculations. Установлено влияние пористости подложки из анодного оксида алюминия на основные параметры 4-сенсорной газовой микросистемы. В расчетах использованы зависимости компонентов тензоров модуля упругости и теплопроводности от пористости для α-Al2O3, полученные методом конечных элементов.

APPLICATION OF NANOPOROUS ANODIC ALUMINA BY GAS MICROSYSTEM DESIGN

Influence of the porosity of anodic alumina substrate on basic characteristics of four gas sensor microsystem has been determined. Dependences of the tensor components of modulus of elasticity and thermalconductivity coefficients as a function of α-Al2O3 porosity obtained by FEA were utilized in the calculations