13 research outputs found

    Tilted cc-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity

    Full text link

    FBAR filter with asymmetric frequency response and improved selectivity and passband width

    No full text
    The paper is dedicated on the improving of the frequency response of FBAR filters by replacement some of the single FBARs with two parallel connected resonators. The method is applied for the basic lattice filter architecture and its modification with twice less number of FBARs. The conditions, which must satisfy the resonator parameters, are derived by theoretical considerations and computer simulations

    COMSOL modeling of SAW Resonators

    No full text
    Here we demonstrate some generic 2D and 3D routines for SAW analysis employing the commercial COMSOL Multiphysics platform for finite element analysis (FEA). More specifically, we consider the analysis and optimization of high performance LSAW resonators for RF filters. The LSAW nature - being well studied and sufficiently complicated - is chosen as a suitable example for analysis and the results are compared to state-of-the-art knowledge. We found very good agreement between the results of the analytical scheme proposed here and the state-of-art findings. Finally, we demonstrate a TC-SAW piston-mode device simulated using SiO2/128 degrees Y-X LiNbO3

    Bulk Acoustic Wave Transformer employing Periodically Polled array of Piezoelectric Rods

    No full text
    Multilayer bulk acoustic wave transformer employing a periodical array of piezoelectric rods with alternating polarization is experimentally demonstrated for the first time. Voltage transformation coefficient in excess of 6 was measured at a frequency of 150kHz, providing thus a solid experimental verification of the recently proposed principle of operation. Finite element analysis is used to reveal the underlying device physics

    5 GHz Band n79 wideband microacoustic filter using thin lithium niobate membrane

    No full text
    Microacoustic resonators made on suspended continuous membranes of LiNbO3 were recently shown to have very strong coupling and low losses at >= 5 GHz, suitable for high-performance filter design. Employing these simple resonator structures, the authors have designed, fabricated, and measured a 4.7 GHz bandpass ladder-type filter having 1 dB mid-band loss and 600 MHz bandwidth to address the 5G Band n79 requirements. The filter is fabricated on a monolithic substrate using standard i-line optical lithography and standard semiconductor processing methods for membrane release, starting with commercially available ion-sliced wafers having 400 nm thickness crystalline LiNbO3 layers. The filter is well-matched to a 50 Omega network and does not require external matching elements. Through accurate resonator engineering using our finite element method software filter design environment, the passband is spurious-free, and the filter provides better-than 30 dB rejection to the adjacent WiFi frequencies. This filter demonstrates the performance and scalable technology required for high-volume manufacturing of microacoustic filters >3.5 GHz
    corecore