Design and fabrication of an overhanging xy-microactuator with integrated tip for scanning surface profiling

This paper presents a microsystem consisting of an overhanging xy-microstage with integrated tip and comb actuators for scanning surface profiling. The design is optimized with respect to precise xy positioning at low drive voltages and accurate detection of vertical deflection. The structure is micromachined in monocrystalline silicon, requiring only three masks and combining various techniques such as KOH and sacrificial layer etching, silicon fusion bonding and wet isotropic and dry anisotropic etching

Microfabricated tools for nanoscience

Recent developments and advances in micro-electro-mechanical systems for nanometer-scale applications such as scanning force microscopy are presented. The microfabrication of tools so small that they enable access to the nanoworid, such as tips, flexible cantilevers, integrated deflection sensors and nanoactuators will be described. Bulk and surface micromachining of mono or polycrystalline silicon, extended by aligned-wafer-bonding, etch-back and sacrificial-iayer-etching steps are major fabrication steps used. Experiments on prototypes show that these devices are promising for use as ultra-sensitive stand-alone local probe micro-instruments

AFM imaging with an xy-micropositioner with integrated tip

We have fabricated an xy-microstage with integrated protruding tip and electrostatic comb actuators for scanning probe surface imaging. This device, which is micromachined in monocrystalline silicon, nas been actuated and characterized and, for the first time with a such a microtool, an atomic force microscope (AFM) profile has been achieved

Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum

This paper presents a comparative study of surface micromachined structures fabricated in three different materials, using torsional micromirrors as test vehicle. The devices are realized in single-crystal silicon, polycrystalline silicon and aluminum. Mechanical properties such as internal strains, sticking phenomena, yield strains and endurance test resistance as well as optical properties such as surface reflectivities and scattering characteristics are investigated on the devices. the characterization points out that the silicon and polysilicon structures present higher yield strains and are less prone to surface sticking while the aluminum mirrors have higher surface refiectivities

Year in review in Intensive Care Medicine 2010: I. Acute renal failure, outcome, risk assessment and ICU performance, sepsis, neuro intensive care and experimentals

SCOPUS: re.jinfo:eu-repo/semantics/publishe