Particle Collecting in a 13.56 MHz Radiofrequency Methane Discharge

Fig. 1: Particle trapping near the electrodes in RF methane plasma (RF = 80W, pressure 130 Pa and flow rate 5.6 sccm) put in evidence by laser light scattering: (a) under the RF electrode 200 s after the plasma is switched on, (b) above the grounded electrode 300 s after the plasma is switched on. The particle cloud form follows the electrical field lines. The authors are with the GREMI, Groupe de Recherches sur l'Energétique des Milieux Ionisés, UMR6606, CNRS/Université d'Orléans, Faculté de

Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power

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Influence of the particle formation and behavior on the electrical parameters in low pressure radio-frequency CH4/N2 discharges

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Luminescence properties and structure of hydrogen amorphous carbon nitrile particles obtained in CH4/N2 RF plasmas

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Analyse par Spectroscopie infrarouge des particules carbonées contenues dans une décharge R.F. basse pression de méthane azote

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Influence of the power on the particles generated in a low pressure radio-frequency nitrogen -rich methane discharge

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Influence of the particle formation and behavior on the electrical parameters in the low pressure radio frequency discharge.

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Particles generated in a low pressure radio frequency nitrogen-rich methane discharge

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