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A low-power pressure-and temperature-programmed separation system for a micro gas chromatograph.
This thesis presents the theory, design, fabrication and testing of the microvalves and columns necessary in a pressure- and temperature-programmed micro gas chromatograph ({micro}GC). Two microcolumn designs are investigated: a bonded Si-glass column having a rectangular cross section and a vapor-deposited silicon oxynitride (Sion) column having a roughly circular cross section. Both microcolumns contain integrated heaters and sensors for rapid, controlled heating. The 3.2 cm x 3.2 cm, 3 m-long silicon-glass column, coated with a non-polar polydimethylsiloxane (PDMS) stationary phase, separates 30 volatile organic compounds (VOCs) in less than 6 min. This is the most efficient micromachined column reported to date, producing greater than 4000 plates/m. The 2.7 mm x 1.4 mm Sion column eliminates the glass sealing plate and silicon substrate using deposited dielectrics and is the lowest power and fastest GC column reported to date; it requires only 11 mW to raise the column temperature by 100 C and has a response time of 11s and natural temperature ramp rate of 580 C/min. A 1 m-long PDMS-coated Sion microcolumn separates 10 VOCs in 52s. A system-based design approach was used for both columns
Michigan 2004
http://www.umtri.umich.edu/tdc/codebook.htmlhttp://deepblue.lib.umich.edu/bitstream/2027.42/13904/2/32767A31.pd
Missouri 2004
http://www.umtri.umich.edu/tdc/codebook.htmlhttp://deepblue.lib.umich.edu/bitstream/2027.42/13905/2/97669A03.pd
FARS 2004- Version 13-Oct-05. Annual report file
http://www.umtri.umich.edu/tdc/codebook.htmlhttp://deepblue.lib.umich.edu/bitstream/2027.42/13901/2/43157A43.pd
NASS CDS 2004 - version 15-Sep-05
http://www.umtri.umich.edu/tdc/codebook.htmlhttp://deepblue.lib.umich.edu/bitstream/2027.42/13902/2/88992A20.pd
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