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1 research outputs found
Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges
Author
Chabert P
+28聽more
Crintea D L
Czarnetzki U
Czarnetzki U
Czarnetzki U Kadetov V A
D Luggenh枚lscher
Dittmann K
Donk贸 Z
E Sch眉ngel
Gans T
Gans T
Gans T
Godyak V A
Heil B G
J Schulze
Phelps A V
Robiche J
Sato A H
Schulz von der Gathen V
Schulze J
Schulze J
Schulze J
Schulze J
Schulze J
Schulze J
Turner M M Chabert P Levif P Boyle P Robiche J
U Czarnetzki
Wood B P
Z Donk贸
Publication venue
'IOP Publishing'
Publication date
Field of study
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