Investigating Fused Silica Bending Strength and Damping Characteristics on Resonators Fabricated through Femtosecond Laser-Assisted Wet Etching: An Experimental Analysis

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Instrumented Flexible Glass Structure: A Bragg Grating Inscribed with Femtosecond Laser Used as a Bending Sensor.

peer reviewedFused silica glass is a material with outstanding mechanical, thermal and optical properties. Being a brittle material, it is challenging to shape. In the last decade, the manufacturing of monolithic flexible mechanisms in fused silica has evolved with the femtosecond-laser-assisted etching process. However, instrumenting those structures is demanding. To address this obstacle, this article proposes to inscribe a Bragg Grating sensor inside a flexure and interface it with an optical fibre to record the strain using a spectrum analyser. The strain sensitivity of this Bragg Grating sensor is characterized at 1.2 pm/μϵ (1 μϵ = 1 microstrain). Among other applications, deformation sensing can be used to record a force. Its use as a micro-force sensor is estimated. The sensor resolution is limited by our recording equipment to 30 μN over a measurement range above 10 mN. This technology can offer opportunities for surgery applications or others where precision and stability in harsh environments are required

Femtosecond Laser pulses Waveguide Bragg grating silica glass wet etching

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Bragg grating manufacturing in planar silica substrates

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Bragg grating manufacturing in planar silica substrates

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Femtosecond pulse laser-engineered glass flexible structures instrumented with an in-built Bragg grating sensor

The advent of near-infrared femtosecond pulse laser has enabled the highly-resolved manufacturing of micro/nano structures in various materials including glass. In this paper, we make use of an automated femtosecond laser system, so-called Femtoprint, to design a monolithic self-instrumented mechanism that we use for in-built strain sensing. To that aim, a flexible structure is designed and produced from a silica planar substrate. It has a flexural joint in which an optical waveguide and a Bragg grating have been directly inscribed using femtosecond pulse laser. The latter provides a non-destructive and non-intrusive measurement tool. The axial strain sensitivity of the in-built Bragg grating has been experimentally determined to be 1.22 pm/$mu$ ϵ, while its temperature sensitivity is 10.51 pm/ANDinfo:eu-repo/semantics/publishe

Femtosecond Laser Micro/Nano-Machining of Silica Glass Planar Substrates for the Production of Bragg Gratings

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Fabrication of Bragg Gratings in Flat Silica Substrates Using the Femtoprint Device and Use for Sensing.

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Fabrication of an optical waveguide using the femtoprint process

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Synthesis of an optical waveguide in bulk silica with a femtosecond laser inscription and wet etching treatment

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