6 research outputs found
Observation of the Berreman Effect in Infrared Reflection-Absorption Spectra of Amorphous Titanium Oxide Thin Films Deposited on Aluminum
Infrared spectroscopy investigation of various plasma-deposited polymer films irradiated with 170 keV He+ ions
This work illustrates the advantages of using p-polarized radiation at an incidence angle of 70 degrees in contrast to the conventional unpolarized beam at normal (or near-normal) incidence for the infrared spectroscopic study of polycarbosilane, polysilazane and polysiloxane thin films synthesized by plasma enhanced chemical vapor deposition (PECVD) and subsequently irradiated with 170 keV He+ ions at fluences from 1 x 10(14) to 1 x 10(16) cm(-2). Several bands not seen using the conventional mode could be observed in the polarized mode. (c) 2006 Elsevier B.V. All rights reserved