MEMS Bio-Probe Devices for Monitoring of Various Blood Properties

A set of MEMS Bio-Probes is designed, fabricated over a five-week period, then packaged and tested for functionality. The devices were fabricated to near completion however they were not brought to a point where they could be electrically tested. The fabrication of the devices went remarkable well. This indicates that there is potential for the device to work as originally intended

Journal of Microelectronic Research 2010

https://scholarworks.rit.edu/meec_archive/1018/thumbnail.jp