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2 research outputs found
Hillocks on half-micron aluminum lines
Author
Carey A. Pico
Hinode
Tom D. Bonifield
Publication venue
'Cambridge University Press (CUP)'
Publication date
Field of study
No full text
Crossref
The properties of thermal hillocks as a function of linewidth and process parameter in Al-on-chemical-vapor-deposited W films
Author
Carey A. Pico
Chaudari
+15Â more
d'Heurle
Gardner
Herman
Hinode
Jackson
Liu
Murakami
Pico
Pico
Presland
Schwoebel
Scoggan
Tom D. Bonifield
Townsend
Vaiday
Publication venue
'Cambridge University Press (CUP)'
Publication date
Field of study
No full text
Crossref
No full text
No full text
