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3 research outputs found
The Formation Mechanism and Step Coverage Quality of Tetraethylorthosilicate ‐ SiO2 Films Studied by the Micro/Macrocavity Method
Author
Hiroshi Komiyama
Kazuyuki Ikuta
+3 more
Satoru Shiga
Tetsuji Sorita
Yasuyuki Egashira
Publication venue
'The Electrochemical Society'
Publication date
Field of study
No full text
Crossref
Mass Spectrometric and Kinetic Study of Low‐Pressure Chemical Vapor Deposition of Si3 N 4 Thin Films from SiH2Cl2 and NH 3
Author
Hiroshi Adachi
Kiyoteru Kobayashi
+3 more
Tamotsu Ogata
Tetsuji Sorita
Tetsuya Satake
Publication venue
'The Electrochemical Society'
Publication date
Field of study
No full text
Crossref
テトラエトキシシラン Tetraethoxysilane TEOS ノ キソウ ネツブンカイ ハンノウ ノ ソクドロンテキ リロンテキ ケンキュウ
Author
Adachi Hiroshi
Satake Tetsuya
+4 more
Sorita Tetsuji
佐竹 徹也
反田 哲史
足達 廣士
Publication venue
電気材料技術懇談会
Publication date
01/11/1995
Field of study
Full text link
Osaka University Knowledge Archive