4 research outputs found

    Measurement of heat capacity of al thin film using a micro bridge calorimeter

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    A microcalorimeter was fabricated with combination of IC technology and silicon surface micro-fabrication technology. The device has good manufacturing yield and precisely controlled pattern size compared to the bulk micro-machined one. In vacuum with heating power of 5.5 mW, the temperature of the micro calorimeter rises from 300 K to 400 K in 0.5 ms, and the heating rate is up to 2 × 10<sup>5</sup>K/s. According to the characteristics of small thermal mass and fast heating rate of the microcalorimeter, pulse calorimetry was introduced to measure the heat capacity of thin films. Heat capacity of Al thin film with thickness of (430 ± 20)nm was measured from 300 K to 420 K. Result shows that heat capacity of the Al film is 9.2 nJ/K at room temperature. If the density of the film is 2700 kg/m<sup>3</sup>, then the specific heat capacity of the film is about 1096.8 J/(kg·K). It is 21.9% larger than the specific heat capacity of the bulk Al of 900 J/(kg·K), which indicates the enhancement of specific heat capacity of nanocrystalline metals

    Investigation on measurement of micro gas sensor stability

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    The stability of a series of micro hotplate based gas sensors were investigated and the descriptive methods were discussed in focus. From the point of statistics, the general feature parameters to denote gas sensors' stability were compared and an optimal parameter set was extracted. The variation coefficient of parameters was adopted to describe the stability. By using this approach, the influences of preheating time on gas sensors' stability were investigated
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