時間領域サーモリフレクタンス法を用いたナノ界面構造による熱伝導制御性の評価

学位の種別: 課程博士審査委員会委員 : （主査）東京大学准教授 塩見 淳一郎, 東京大学教授 丸山 茂夫, 東京大学教授 大宮司 啓文, 東京大学准教授 野村 政宏, 産業技術総合研究所主任研究員 八木 貴志University of Tokyo(東京大学

Filler-depletion layer adjacent to interface impacts performance of thermal interface material

When installing thermal interface material (TIM) between heat source and sink to reduce contact thermal resistance, the interfacial thermal resistance (ITR) between the TIM and heat source/sink may become important, especially when the TIM thickness becomes smaller in the next-generation device integration. To this end, we have investigated ITR between TIM and aluminum surface by using the time-domain thermoreflectance method. The measurements reveal large ITR attributed to the depletion of filler particles in TIM adjacent to the aluminum surface. The thickness of the depletion layer is estimated to be about 100 nm. As a consequence, the fraction of ITR to the total contact thermal resistance becomes about 20% when the TIM thickness is about 50 μm (current thickness), and it exceeds 50% when the thickness is smaller than 10 μm (next-generation thickness)