Fracture strain of LPCVD polysilicon

A polysilicon bridge-slider structure in which one end of the bridge is fixed and the other is connected to a plate sliding in two flanged guideways, is designed and fabricated to study the strain at fracture of LPCVD polysilicon. In the experiments, a mechanical probe is used to push against the plate end, compressing and forcing the bridge to buckle until it breaks. The distance that the plate needs to be pushed to break the bridge is recorded. Nonlinear beam theory is then used to interpret the results of these axially-loaded-bridge experiments. The measured average fracture strain of as-deposited LPCVD polysilicon is 1.72%. High-temperature annealing of the bridge-sliders at 1000°C for 1 h decreases the average fracture strain to 0.93%

Band structure of honeycomb photonic crystal slabs

Two-dimensional (2D) honeycomb photonic crystals with cylinders and connecting walls have the potential to have a large full band gap. In experiments, 2D photonic crystals do not have an infinite height, and therefore, we investigate the effects of the thickness of the walls, the height of the slabs and the type of the substrates on the photonic bands and gap maps of 2D honeycomb photonic crystal slabs. The band structures are calculated by the plane wave expansion method and the supercell approach. We find that the slab thickness is a key parameter affecting the band gap size while on the other hand the wall thickness hardly affact the gap size. For symmetric photonic crystal slabs with lower dielectric claddings, the height of the slabs needs to be sufficiently large to maintain a band gap. For asymmetric claddings, the projected band diagrams are similar to that of symmetric slabs as long as the dielectric constants of the claddings do not differ greatly.Comment: Accepted for publication in Journal of Applied Physic

MEMS flow sensors for nano-fluidic applications

This paper presents micromachined thermal sensors for measuring liquid flow rates in the nanoliter-per-minute range. The sensors use a boron-doped polysilicon thinfilm heater that is embedded in the silicon nitride wall of a microchannel. The boron doping is chosen to increase the heater’s temperature coefficient of resistance within tolerable noise limits, and the microchannel is suspended from the substrate to improve thermal isolation. The sensors have demonstrated a flow rate resolution below 10 nL/min, as well as the capability for detecting micro bubbles in the liquid. Heat transfer simulation has also been performed to explain the sensor operation and yielded good agreement with experimental data

Implantable RF-coiled chip packaging

In this paper, we present an embedded chip integration technology that utilizes silicon housings and flexible parylene radio frequency (RF) coils. As a demonstration of this technology, a flexible parylene RF coil has been integrated with an RF identification (RFID) chip. The coil has an inductance of 16 μH, with two layers of metal completely encapsulated in parylene-C. The functionality of the embedded chip is verified using an RFID reader module. Accelerated-lifetime soak testing has been performed in saline, and the results show that the silicon chip is well protected and the lifetime of our parylene-encapsulated RF coil at 37 °C is more than 20 years

A MEMS electrostatic particle transportation system

We demonstrate here an electrostatic MEMS system capable of transporting particles 5-10μm in diameter in air. This system consists of 3-phase electrode arrays covered by insulators (Figs. 1, 2). Extensive testing of this system has been done using a variety of insulation materials (silicon nitride, photoresist, and Teflon), thickness (0- 12μm), particle sizes (1-10μm), particle materials (metal, glass, polystyrene, spores, etc), waveforms, frequencies, and voltages. Although previous literature [1-2] claimed it impractical to electrostatically transport particles with sizes 5-10μm due to complex surface forces, this effort actually shows it feasible (as high as 90% efficiency) with the optimal combination of insulation thickness, electrode geometry, and insulation material. Moreover, we suggest a qualitative theory for our particle transportation system which is consistent with our data and finite-element electrostatic simulations

A micro cell lysis device

A new micromachined cell lysis device is developed. It is designed for miniature bio-analysis systems where cell lysing is needed to obtain intracellular materials for further analysis such as DNA identification. It consists of muti-electrode pairs to apply electric fields to cells. We adopt the means of using electric field lysing because it can greatly simplify purification steps for preparation of biological samples, when compared to conventional chemical methods. Yeast, Chinese cabbage, radish cells and E. coli are tested with the device. The lysis of yeast, Chinese cabbage, radish cells is observed by a microscope. The experimental observation suggests E. coli are also lysed by the pulsed electric field. The range of electric field for the lysis is on the order of 1 kV/cm to 10 kV/cm. In addition, for practical reasons, we reduce the voltage required for lysing to less than 10 V by making the electrode gap on the order of microns

A suspended microchannel with integrated temperature sensors for high-pressure flow studies

A freestanding microchannel, with integrated temperature sensors, has been developed for high-pressure flow studies. These microchannels are approximately 20μm x 2μm x 4400μm, and are suspended above 80 μm deep cavities, bulk micromachined using BrF3 dry etch. The calibration of the lightly boron-doped thermistor-type sensors shows that the resistance sensitivity of these integrated sensors is parabolic with respect to temperature and linear with respect to pressure. Volumetric flow rates of N2 in the microchannel were measured at inlet pressures up to 578 psig. The discrepancy between the data and theory results from the flow acceleration in a channel, the non-parabolic velocity profile, and the bulging of the channel. Bulging effects were evaluated by using incompressible water flow measurements, which also measures 1.045x10^-3N-s/m^2 for the viscosity of DI water. The temperature data from sensors on the channel shows the heating of the channel due to the friction generated by the high-pressure flow inside

Complete gradient-LC-ESI system on a chip for protein analysis

This paper presents the first fully integrated gradient-elution liquid chromatography-electrospray ionization (LC-ESI) system on a chip. This chip integrates a pair of high-pressure gradient pumps, a sample injection pump, a passive mixer, a packed separation column, and an ESI nozzle. We also present the successful on-chip separation of protein digests by reverse phase (RP)-LC coupled with on-line mass spectrometer (MS) analysis