MEMS flow sensors for nano-fluidic applications

This paper presents micromachined thermal sensors for measuring liquid flow rates in the nanoliter-per-minute range. The sensors use a boron-doped polysilicon thinfilm heater that is embedded in the silicon nitride wall of a microchannel. The boron doping is chosen to increase the heater’s temperature coefficient of resistance within tolerable noise limits, and the microchannel is suspended from the substrate to improve thermal isolation. The sensors have demonstrated a flow rate resolution below 10 nL/min, as well as the capability for detecting micro bubbles in the liquid. Heat transfer simulation has also been performed to explain the sensor operation and yielded good agreement with experimental data

Band structure of honeycomb photonic crystal slabs

Two-dimensional (2D) honeycomb photonic crystals with cylinders and connecting walls have the potential to have a large full band gap. In experiments, 2D photonic crystals do not have an infinite height, and therefore, we investigate the effects of the thickness of the walls, the height of the slabs and the type of the substrates on the photonic bands and gap maps of 2D honeycomb photonic crystal slabs. The band structures are calculated by the plane wave expansion method and the supercell approach. We find that the slab thickness is a key parameter affecting the band gap size while on the other hand the wall thickness hardly affact the gap size. For symmetric photonic crystal slabs with lower dielectric claddings, the height of the slabs needs to be sufficiently large to maintain a band gap. For asymmetric claddings, the projected band diagrams are similar to that of symmetric slabs as long as the dielectric constants of the claddings do not differ greatly.Comment: Accepted for publication in Journal of Applied Physic

Implantable RF-coiled chip packaging

In this paper, we present an embedded chip integration technology that utilizes silicon housings and flexible parylene radio frequency (RF) coils. As a demonstration of this technology, a flexible parylene RF coil has been integrated with an RF identification (RFID) chip. The coil has an inductance of 16 μH, with two layers of metal completely encapsulated in parylene-C. The functionality of the embedded chip is verified using an RFID reader module. Accelerated-lifetime soak testing has been performed in saline, and the results show that the silicon chip is well protected and the lifetime of our parylene-encapsulated RF coil at 37 °C is more than 20 years

A MEMS electrostatic particle transportation system

We demonstrate here an electrostatic MEMS system capable of transporting particles 5-10μm in diameter in air. This system consists of 3-phase electrode arrays covered by insulators (Figs. 1, 2). Extensive testing of this system has been done using a variety of insulation materials (silicon nitride, photoresist, and Teflon), thickness (0- 12μm), particle sizes (1-10μm), particle materials (metal, glass, polystyrene, spores, etc), waveforms, frequencies, and voltages. Although previous literature [1-2] claimed it impractical to electrostatically transport particles with sizes 5-10μm due to complex surface forces, this effort actually shows it feasible (as high as 90% efficiency) with the optimal combination of insulation thickness, electrode geometry, and insulation material. Moreover, we suggest a qualitative theory for our particle transportation system which is consistent with our data and finite-element electrostatic simulations

Fracture strain of LPCVD polysilicon

A polysilicon bridge-slider structure in which one end of the bridge is fixed and the other is connected to a plate sliding in two flanged guideways, is designed and fabricated to study the strain at fracture of LPCVD polysilicon. In the experiments, a mechanical probe is used to push against the plate end, compressing and forcing the bridge to buckle until it breaks. The distance that the plate needs to be pushed to break the bridge is recorded. Nonlinear beam theory is then used to interpret the results of these axially-loaded-bridge experiments. The measured average fracture strain of as-deposited LPCVD polysilicon is 1.72%. High-temperature annealing of the bridge-sliders at 1000°C for 1 h decreases the average fracture strain to 0.93%

Quantitative strain-field measurement of 1:1 B-site cation ordered domains and antiphase boundaries in Pb(Sc1/2Ta1/2)O3 ceramics by high-resolution transmission electron microscopy

Quantitative strain measurements of the 1:1 B-site cation ordered domains, antiphase boundaries and dislocations in a highly ordered Pb(Sc1/2Ta1/2)O3 ceramic have been carried out by high-resolution transmission electron microscopy and geometric phase analysis. A phase shift of PI between two adjacent ordered domains across an antiphase boundary are determined unambiguously. The maximum in-plane strain and lattice rotation induced by a dislocation are 9.5% and 5.4deg, respectively. In a defect-free antiphase boundary, the maximum in-plane strain and lattice rotation are 1.8% and 0.9deg, respectively. The strain mainly concentrates inside the antiphase boundary.Comment: 13 pages, 4 figure

Complete gradient-LC-ESI system on a chip for protein analysis

This paper presents the first fully integrated gradient-elution liquid chromatography-electrospray ionization (LC-ESI) system on a chip. This chip integrates a pair of high-pressure gradient pumps, a sample injection pump, a passive mixer, a packed separation column, and an ESI nozzle. We also present the successful on-chip separation of protein digests by reverse phase (RP)-LC coupled with on-line mass spectrometer (MS) analysis

A dynamic ridesharing dispatch and idle vehicle repositioning strategy with integrated transit transfers

We propose a ridesharing strategy with integrated transit in which a private on-demand mobility service operator may drop off a passenger directly door-to-door, commit to dropping them at a transit station or picking up from a transit station, or to both pickup and drop off at two different stations with different vehicles. We study the effectiveness of online solution algorithms for this proposed strategy. Queueing-theoretic vehicle dispatch and idle vehicle relocation algorithms are customized for the problem. Several experiments are conducted first with a synthetic instance to design and test the effectiveness of this integrated solution method, the influence of different model parameters, and measure the benefit of such cooperation. Results suggest that rideshare vehicle travel time can drop by 40-60% consistently while passenger journey times can be reduced by 50-60% when demand is high. A case study of Long Island commuters to New York City (NYC) suggests having the proposed operating strategy can substantially cut user journey times and operating costs by up to 54% and 60% each for a range of 10-30 taxis initiated per zone. This result shows that there are settings where such service is highly warranted

Electrolysis-based diaphragm actuators

This work presents a new electrolysis-based microelectromechanical systems (MEMS) diaphragm actuator. Electrolysis is a technique for converting electrical energy to pneumatic energy. Theoretically electrolysis can achieve a strain of 136 000% and is capable of generating a pressure above 200 MPa. Electrolysis actuators require modest electrical power and produce minimal heat. Due to the large volume expansion obtained via electrolysis, small actuators can create a large force. Up to 100 µm of movement was achieved by a 3 mm diaphragm. The actuator operates at room temperature and has a latching and reversing capability