3 research outputs found
Theoretical basis for controlling minimal tumor temperature during interstitial conductive heat therapy
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Optimal control of a CVD reactor for prescribed temperature behavior
The optimal control of a CVD reactor is an important issue in the semiconductor industry. In this report the authors examine the issues of using large-scale optimization methods for the solution of the CVD optimal control problem. They consider using the TWAFER analysis code to compute the temperature distributions inside a CVD reactor and coupling it with a nonlinear optimization code to find the optimal power curves which achieve a specified target temperature in minimum time. A model problem is numerically tested and analyzed to give insight into the proposed method. The test results indicate that this approach can yield excellent predictions for the optimal power curves