Problems of the human body model and electrostatic discharge part 1: discharge from LSIs held by a charged person

Abstract. The nanosecond transient response between a pin of a large-scale integrated circuit (LSI) held by a charged person and the ground plane showed a very sharp impulse and high peak current. This response could not be represented using the human body model (HBM), and it was caused by the parasitic capacity between an inner conductor in the LSI and the ground plane. However, the conventional HBM tester could not control the low capacitance. Consequently, the machine model (MM) using a low capacitance or the charged device model (CDM) with low device capacitance should be used. Moreover, the capacitanc of charged objects including LSIs can be determined by a Coulomb meter. Practical use of these data will give us the methods to prevent electrostatic discharge troubles for quarter-micron LSIs