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1 research outputs found
誘電体窓を多数有する縦長表面波プラズマ装置におけるプラズマ密度分布空間制御に関する研究
Author
D. Korzec F. Werner, A. Brochkhaus
H. Murohasi T. Okamoto, and Y. Oka
+10 more
K. Kusaba K. Shinagawa, M. Furukaw
K. Senda K. Umehara, and Y. Sakamo
M. Furukawa N. Saito, K. Kawamura,
M. Nagatsu G. Xu, I. Ghanashev, M.
N. Yanagita T. Itagaki, and M. Kat
S. Morita M. Natagsu, I. Ghanashev
T. Kimura Y. Yoshida, and S. Mizug
T. Morino and M. Katsurai
柳田憲史·
森野達郎·
Publication venue
'Institute of Electrical Engineers of Japan (IEE Japan)'
Publication date
01/01/2005
Field of study
No full text
Crossref
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