Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine 8 PACS 85

Abstract. We consider the features of formation of AuTiPd ohmic contacts to p + -Si. Metallization was made by vacuum thermal sputtering of Pd, Ti and Au films onto the Si substrate heated up to 330 С. It is shown that the contact resistivity increases with temperature; this is typical of metallic conductivity. We suggest that the ohmic contact is formed owing to appearance of shunts at Pd deposition on dislocations or other structural defects. The number of shunts per unit area is close to the measured density of structural defects at the metalSi interface