2 research outputs found
Diagnostics of DC-pulse SiH4 plasmas using laser-induced fluorescence and optical emission spectroscopy
- Publication venue
- 'Institution of Engineering and Technology (IET)'
- Publication date
- Field of study
Literaturhinweise
- Author
- A Bouchoule
- A Czernichowski
- A Engel von
- A Engel von
- A Frohn
- A Gicquel
- A Lompe
- A Lunk
- A Pastrol
- A Ricard
- A Ricard
- A Ricard
- A Szabo
- AH Lettington
- AM Pointu
- AM Pointu
- B Adamczyk
- B Chapman
- B Edenhofer
- B Kulakowska
- B Kulakowska
- B Meyerson
- BL Preppernau
- C Barbeau
- C Barbeau
- C Böhm
- C Gomez-Aleixandre
- C Weissmantel
- C Weissmantel
- C Weissmantel
- C Weissmantel
- C Wild
- C Wild
- CIM Beenakker
- CM Horwitz
- CV Deshpandey
- D Mann
- DM Mattox
- DM Mattox
- DM Phillips
- DW Hess
- DW Hess
- E Cal de la
- EH Sirvio
- F Jansen
- F Janzen
- G Janzen
- G Sultan
- G Sultan
- GE Thomas
- GG Tibbets
- H Chatham
- H Chen
- H Frey
- H Holleck
- H Kawata
- H Randhhawa
- H Suzuki
- H Tawarara
- H Wilhelmi
- HD Hagstrum
- HF Winters
- HJ Kim
- HJ Spies
- HJ Spies
- HJ Tiziani
- HJ Warnecke
- HR Griem
- I Abril
- I Abril
- I Kovacs
- J Amorim
- J Ballesteros
- J Bougdira
- J Bougdira
- J Felts
- J Fessmann
- J Guttler
- J Janca
- J Jolly
- J Kölbel
- J Perrin
- J Robertson
- J Röpke
- J Wagner
- JA Bittencourt
- JA Thornton
- JA Thornton
- JC Angus
- JC Angus
- JC Angus
- JC Knight
- JD Morrison
- JF Aarts
- JM Molarius
- JM Sommerville
- JS Morill
- JW Coburn
- JW Coburn
- K Bethge
- K Enke
- K Köhler
- K Miyatani
- K Tachibana
- KD Pang
- KG Emeleus
- KL Chopra
- KT Rie
- KT Rie
- KT Rie
- KT Rie
- L Felts
- L Petitjean
- L Petitjean
- LE Toth
- M Hirose
- M Hudis
- M Moisan
- M Pealat
- M Shimozuma
- M Venugopalan
- M Zlatanovic
- MJ Kushner
- N Brenning
- N. N.
- N. N.
- N. N.
- O Auciello
- O Leroy
- O Matsumoto
- OJ Orient
- P D’Agostino
- P D’Agostino
- P Plessis
- P Stratil
- P Stratil
- R Avni
- R Grün
- R Hugon
- R Reuschling
- R Tabersky
- RA Gottscho
- RA Haefer
- RA Haefer
- RF Bunshah
- RH Huddlestone
- RS Bonetti
- S Bockel
- S Nguyen
- S Strämke
- S Suckewer
- S Svanberg
- S Veprek
- SJ Bull
- St Eisenberg
- T Hokaya
- T Hsiao-Chu
- T Karpinski
- T Kokubo
- T Lampe
- T Lampe
- T Lampe
- T Wierzchen
- TA Miller
- U König
- VM Donnelly
- VM Donnelly
- W Olbrich
- W Wagner
- WC Dautremont-Smith
- WRL Masamba
- Y Catherine
- Y Lakhatin
- Y Namba
- Y Sun
- Y Yamashita
- YM Kagan
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- 01/01/1998
- Field of study