Deposition of Thin Films Composed of Fe 81 BB 13.5 Si 3.5 Co 2 Material by PLD Method Using the ArF Excimer Laser

Depositions of thin films, composed of Fe 81 BB 13.5 Si 3.5 Co 2 material were performed with ArF excimer laser (λ = 193 nm). The material, with expected large magnetoelastic coefficient is potentially applicable in sensor and actuator technology. Depositions were done on polished <100> orientation Si substrates held at different temperatures: RT, 250 C, 450 C and 550 C. Results of AFM, MFM, SEM, EDS and FTIR measurements of the layers as a function of process parameters, in particular of the substrate temperature, are presented

Evaluation of morphology, mechanical properties and adhesion of boron nitride thin films produced using pulsed laser deposition

The article presents preliminary results of investigation on morphology (AFM, FTIR) of boron nitride thin films deposited onto steel substrates using PLD method. Mechanical properties (hardness and elastic modulus) of the coatings and their adhesion to the substrates were measured.On the basis of obtained results, the possibility of using steel as a substrate for pulsed laser depositionof BN films was confirmed.[b]Keywords[/b]: thin films, boron nitride, nanohardness, critical loa