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4 research outputs found

A Novel Vapor Phase Etching Process for Si

Author: Steven Verhaverbeke
Publication venue: 'Trans Tech Publications, Ltd.'
Publication date
Field of study

Dielectric breakdown in thermally grown oxide layers Analysis, effects of contamination and cleaning strategy for defect reduction

Author: Louvain Katholieke Univ., Heverlee (Belgium). Departement Elektrotechniek
Verhaverbeke Steven
Publication venue
Publication date: 01/01/1993
Field of study

SIGLEKULeuven Campusbibliotheek Exacte Wetenschappen / UCL - Université Catholique de LouvainBEBelgiu

OpenGrey Repository

Mechanism and Principles of Post Etch Al Cleaning with Inorganic Acids

Author: Han Wen Chen
Jim Papanu
Roman Gouk
Steven Verhaverbeke
Publication venue: 'Trans Tech Publications, Ltd.'
Publication date
Field of study

Surface modification and contamination characterization of ion-enhanced, implanted photoresist removal

Author: Bo Su
Draper
Han-Wen Chen
James S. Papanu
Mark N. Kawaguchi
Nelson
Steven Verhaverbeke
Yu
Publication venue: 'American Vacuum Society'
Publication date: 01/01/2007
Field of study

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