Suspended photonic waveguide arrays for submicrometer alignment

This paper presents a new alignment concept for the alignment of multichannel photonic intergrated circuits (PICs) using flexible photonic waveguides on one of the PICs that are positionable by integrated micro electro mechanical system (MEMS) actuators. The concept aims for high precision and high degree of assembly process automation. The proposed concept includes pre-alignment of both PICs on a common substrate followed by fine-alignment using the on-chip flexible waveguides and MEMS functionality. This paper introduces the alignment approach and reports on the development and fabrication of suspended and mechanically flexible photonic waveguides. Single suspended waveguide beams and suspended arrays with two and four coupled parallel waveguide beams of different lengths (250 ?mto 1000 ?m) and different widths (18 ?mto 34 ?m) are designed and fabricated. After fabrication, waveguide beam fracturing is observed. The fabrication process has been extended by an additional under-etching step in order to reduce beam fracturing. The static out-of-plane deflection of the fabricated devices follows a specific profile with a dominating upward curvature resulting in a measured maximum out-of-plane deflection of 2% of the length. The beam stiffness of the fabricated devices is measured and proves to be within the available force of microactuators.Precision and Microsystems EngineeringMechanical, Maritime and Materials Engineerin

Scientific instrumentation and microtechnology as base for nano-fabrication and -manufacturing

MNE-LaboratoryMechanical, Maritime and Materials Engineerin

Low voltage electroosmotic pump for high density integration into microfabricated fluidic systems

A low voltage electroosmotic (eo) pump suitable for high density integration into microfabricated fluidic systems has been developed. The high density integration of the eo pump required a small footprint as well as a specific on-chip design to ventilate the electrolyzed gases emerging at the platinum (Pt) electrodes. For this purpose, a novel liquid–gas (lg) separator was invented. This lg-separator separated the gas bubbles from the liquid and guided them away from the eo pump. Its operational principle was solely based on the geometry of tapered sidewalls. An eo pump sandwiched by two lg separators (microchannels in the range of 10 lm, footprint of 100 lm 9 15 lm) was experimentally investigated. The lg-separator was able to reliably separate and ventilate an emerging gas flow of 2 pl s-1. The eo pump achieved flow rates of 50 pl s-1 at actuation voltages of 5 V.Precision and Microsystems EngineeringMechanical, Maritime and Materials Engineerin

Suspended photonic waveguide arrays for submicrometer alignment

This paper presents a new alignment concept for the alignment of multichannel photonic intergrated circuits (PICs) using flexible photonic waveguides on one of the PICs that are positionable by integrated micro electro mechanical system (MEMS) actuators. The concept aims for high precision and high degree of assembly process automation. The proposed concept includes pre-alignment of both PICs on a common substrate followed by fine-alignment using the on-chip flexible waveguides and MEMS functionality. This paper introduces the alignment approach and reports on the development and fabrication of suspended and mechanically flexible photonic waveguides. Single suspended waveguide beams and suspended arrays with two and four coupled parallel waveguide beams of different lengths (250 ?mto 1000 ?m) and different widths (18 ?mto 34 ?m) are designed and fabricated. After fabrication, waveguide beam fracturing is observed. The fabrication process has been extended by an additional under-etching step in order to reduce beam fracturing. The static out-of-plane deflection of the fabricated devices follows a specific profile with a dominating upward curvature resulting in a measured maximum out-of-plane deflection of 2% of the length. The beam stiffness of the fabricated devices is measured and proves to be within the available force of microactuators.Precision and Microsystems EngineeringMechanical, Maritime and Materials Engineerin

Engineered 3D Polymer and Hydrogel Microenvironments for Cell Culture Applications

The realization of biomimetic microenvironments for cell biology applications such as organ-on-chip, in vitro drug screening, and tissue engineering is one of the most fascinating research areas in the field of bioengineering. The continuous evolution of additive manufacturing techniques provides the tools to engineer these architectures at different scales. Moreover, it is now possible to tailor their biomechanical and topological properties while taking inspiration from the characteristics of the extracellular matrix, the three-dimensional scaffold in which cells proliferate, migrate, and differentiate. In such context, there is therefore a continuous quest for synthetic and nature-derived composite materials that must hold biocompatible, biodegradable, bioactive features and also be compatible with the envisioned fabrication strategy. The structure of the current review is intended to provide to both micro-engineers and cell biologists a comparative overview of the characteristics, advantages, and drawbacks of the major 3D printing techniques, the most promising biomaterials candidates, and the trade-offs that must be considered in order to replicate the properties of natural microenvironments.Micro and Nano Engineerin

Systematic approach for tolerance analysis of photonic systems

Passive alignment of photonic components is an assembly method compatible with a high production volume. Its precision performance relies completely on the dimensional accuracies of geometrical alignment features. A tolerance analysis plays a key role in designing and optimizing these passive alignment features. The objective of this paper is to develop a systematic approach for conducting such tolerance analysis, starting with a conceptual package design, setting up the tolerance chain, describing it mathematically and converting the misalignment to a coupling loss probability distribution expressed in dB. The method has successfully been applied to a case study where an indium phosphide (InP) chip is aligned with a TriPleX1 (SiO2 cladding with Si3N4 core) interposer via a silicon optical bench (SiOB).Precision and Microsystems EngineeringMechanical, Maritime and Materials Engineerin

Fabrication of a microfluidic device by using two-photon lithography on a positive photoresist

Organ-on-chip (OoC) technology is increasingly used for biomedical research and to speed up the process of bringing a drug from lab to the market. The main fluidic components of an OoC device are microfluidic channels and porous membranes arranged in three dimensions. Current chips are often assembled from several parts. In the development phase a small change in design will cause a delay in the research because a new prototype has to be built and assembled again step-by-step. The research discussed in this paper addresses this point by targeting a monolithic 3D device that can be fabricated in a single lithography and development step, enabling rapid prototyping. Two-photon lithography (TPL) was used in combination with a positive photoresist AZ 4562. The exposure process was characterized, which included an experimental and theoretical study of the voxel size and shape. It was found that the voxel has an hourglass-shape for the laser power settings that were required for process stability. The smallest pores we could produce with these settings measured 250 nm in diameter. The TPL process was then used to fabricate a microfluidic device featuring two crossed channels each one on a separate height-level, connected by a membrane in the centre. Access to the channels was provided through 4 reservoirs from the top-side of the device. The device was successfully filled with water and dried to see whether it can withstand the corresponding capillary forces.Micro and Nano Engineerin

Linear and non-linear vibrations of fluid-filled hollow microcantilevers interacting with small particles

Linear and non-linear vibrations of a U-shaped hollow microcantilever beam filled with fluid and interacting with a small particle are investigated. The microfluidic device is assumed to be subjected to internal flowing fluid carrying a buoyant mass. The equations of motion are derived via extended Hamilton's principle and by using Euler-Bernoulli beam theory retaining geometric and inertial non-linearities. A reduced-order model is obtained applying Galerkin's method and solved by using a pseudo arc-length continuation and collocation scheme to perform bifurcation analysis and obtain frequency response curves. Direct time integration of the equations of motion has also been performed by using Adams-Moulton method to obtain time histories and analyze transient cantilever-particle interactions in depth. It is shown that exploiting near resonant non-linear behavior of the microcantilever could potentially yield enhanced sensor metrics. This is found to be due to the transitions that occur as a matter of particle movement near the saddle-node bifurcation points of the coupled system that lead to jumps between coexisting stable attractors.Accepted Author ManuscriptMicro and Nano Engineerin

All-polymer microelectrode fabrication via high-throughput soft embossing

Micro and Nano Engineerin

Robustness of attractors in tapping mode atomic force microscopy

In this work, we perform a comprehensive analysis of the robustness of attractors in tapping mode atomic force microscopy. The numerical model is based on cantilever dynamics driven in the Lennard–Jones potential. Pseudo-arc-length continuation and basins of attraction are utilized to obtain the frequency response and dynamical integrity of the attractors. The global bifurcation and response scenario maps for the system are developed by incorporating several local bifurcation loci in the excitation parameter space. Moreover, the map delineates various escape thresholds for different attractors present in the system. Our work unveils the properties of the cantilever oscillation in proximity to the sample surface, which is governed by the so-called in-contact attractor. The robustness of this attractor against operating parameters is quantified by means of integrity profiles. Our work provides a unique view into global dynamics in tapping mode atomic force microscopy and helps establishing an extended topological view of the system.Dynamics of Micro and Nano SystemsMicro and Nano Engineerin