Fabrication of three-dimensional suspended, interlayered and hierarchical nanostructures by accuracy-improved electron beam lithography overlay

Nanofabrication techniques are essential for exploring nanoscience and many closely related research fields such as materials, electronics, optics and photonics. Recently, three-dimensional (3D) nanofabrication techniques have been actively investigated through many different ways, however, it is still challenging to make elaborate and complex 3D nanostructures that many researchers want to realize for further interesting physics studies and device applications. Electron beam lithography, one of the two-dimensional (2D) nanofabrication techniques, is also feasible to realize elaborate 3D nanostructures by stacking each 2D nanostructures. However, alignment errors among the individual 2D nanostructures have been difficult to control due to some practical issues. In this work, we introduce a straightforward approach to drastically increase the overlay accuracy of sub-20 nm based on carefully designed alignmarks and calibrators. Three different types of 3D nanostructures whose designs are motivated from metamaterials and plasmonic structures have been demonstrated to verify the feasibility of the method, and the desired result has been achieved. We believe our work can provide a useful approach for building more advanced and complex 3D nanostructures.114sciescopu

Designing nanophotonic structures using deep learning

1

Negative refraction in vertically multilayered hyperbolic metamaterials

1

Vertical multilayer hyperbolic metamaterial

1

조건부 생성적 적대 신경망을 이용한 메타표면 구조체 설계

2

Inverse design enables simple, single-celled metasurfaces for multifunctionalities

1

Designing Nanophotonics Structures using Conditional-Deep Convolutional Generative Adversarial Networks

1

Multicolor and 3D holography realized by single-celled metasurfaces

1