Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams

We study a capacitive MEMS switch composed of two clamped-clamped exible microbeams. We first develop a mathematical model for the MEMS switch where the upper microbeam represents the ground transmission line and the lower one represents the central transmission line. An electrostatic force is applied between the two microbeams to yield the switch to its ON and OFF states. We derive the equations of motion of the system and associated boundary conditions and solve the static and dynamic problems using the differential quadratic method. We show that using only nine grid points gives relatively accurate results when compared to those obtained using FEM. We also examine the transient behavior of the microswitch and obtain results indicating that subsequent reduction in actuation voltage, switching time, and power consumption are expected along with relatively good RF performances. ANSYS HFSS simulator is used in this paper to extract the RF characteristics of the microswitch. HFSS simulation results show that the insertion loss is as low as −0.31 dB and that the return loss is better than −12.41 dB at 10 GHz in the ON state. At the OFF state, the isolation is lower than −23 dB in the range of 10 to 50 GHz

Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams

We study a capacitive MEMS switch composed of two clamped-clamped exible microbeams. We first develop a mathematical model for the MEMS switch where the upper microbeam represents the ground transmission line and the lower one represents the central transmission line. An electrostatic force is applied between the two microbeams to yield the switch to its ON and OFF states. We derive the equations of motion of the system and associated boundary conditions and solve the static and dynamic problems using the differential quadratic method. We show that using only nine grid points gives relatively accurate results when compared to those obtained using FEM. We also examine the transient behavior of the microswitch and obtain results indicating that subsequent reduction in actuation voltage, switching time, and power consumption are expected along with relatively good RF performances. ANSYS HFSS simulator is used in this paper to extract the RF characteristics of the microswitch. HFSS simulation results show that the insertion loss is as low as −0.31 dB and that the return loss is better than −12.41 dB at 10 GHz in the ON state. At the OFF state, the isolation is lower than −23 dB in the range of 10 to 50 GHz

Control of 2D Flexible Structures by Confinement of Vibrations and Regulation of Their Energy Flow

In this paper, we investigate the control of 2D flexible structures by vibration confinement and the regulation of their energy flow along prespecified spatial paths. A discretized-model-based feedback strategy, aiming at confining and suppressing simultaneously the vibration, is proposed. It is assumed that the structure consists of parts that are sensitive to vibrations. The control design introduces a new pseudo-modal matrix derived from the computed eigenvectors of the discretized model. Simulations are presented to show the efficacy of the proposed control law. A parametric study is carried out to examine the effects of the different control parameters on the simultaneous confinement and suppression of vibrations. In addition, we conducted a set of simulations to investigate the flow control of vibrational energy during the confinement-suppression process. We found that the energy flow can be regulated via a set of control parameters for different confinement configurations