3 research outputs found
Scalable and Robust Beam Shaping Using Apodized Fish-bone Grating Couplers
Efficient power coupling between on-chip guided and free-space optical modes
requires precision spatial mode matching with apodized grating couplers. Yet,
grating apodizations are often limited by the minimum feature size of the
fabrication approach. This is especially challenging when small feature sizes
are required to fabricate gratings at short wavelengths or to achieve weakly
scattered light for large-area gratings. Here, we demonstrate a fish-bone
grating coupler for precision beam shaping and the generation of
millimeter-scale beams at 461 nm wavelength. Our design decouples the minimum
feature size from the minimum achievable optical scattering strength, allowing
smooth turn-on and continuous control of the emission. Our approach is
compatible with commercial foundry photolithography and has reduced sensitivity
to both the resolution and the variability of the fabrication approach compared
to subwavelength meta-gratings, which often require electron beam lithography.Comment: 10 pages, 6 figure
The Nanolithography Toolbox
This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro- and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices. Furthermore, the Toolbox allows users to precisely define the number of vertices for each shape or create vectorized shapes using Bezier curves. Parameterized control allows users to design smooth curves with complex shapes. The Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices
Integrating planar photonics for multi-beam generation and atomic clock packaging on chip
A planar platform combining photonic integrated circuits and flip-chip bonded meta-surfaces for multi-color light projection, beam shaping, and polarization control for compact laser cooling