New production method of convex microlens arrays for integrated fluorescence microfluidic detection systems

A new method for producing microlens array with large sag heights is proposed for integrated fluorescence microfluidic detection systems. Three steps in this production technique are included for concave microlens array formations to be integrated into microfluidic systems. First, using the photoresist SU-8 to produce hexagonal microchannel array is required. Second, UV curable glue is injected into the hexagonal microchannel array. Third, the surplus glue is rotated by a spinner at high velocity and exposed to a UV lamp to harden the glue. The micro concave lens molds are then finished and ready to produce convex microlens in poly methsiloxane (PDMS) material. This convex microlens in PDMS can be used for detecting fluorescence in microfluidic channels because a convex microlens plays the light convergence role for optical fiber detection

A promising thermal pressing used in fabricating microlens array

This paper describes a simple and inexpensive technique for designing and fabricating polygon microlens arrays using a thermal pressing process. Polygon microlens array molds were fabricated using lithography and an electroforming process. The microlens patterns were designed on a photomask and transferred to a substrate through photoresist patterning. Electroforming technology was used to convert the photoresist microlens patterns into metallic molds. A hot pressing machine was then used to produce the microlens array in a polycarbonate (PC) substrate. The experimental variables were compression pressure, temperature, and the pressing time. The surface roughness of the produced microlens array was measured using atomic force microscopy (AFM). The average microlens radii of curvature ranged from 315 to 420 mu m and the average sag heights were from 2.98 to 4.03 mu m, respectively. The experimental result showed that this fabrication process is useful for microlens array production

Vacuum suction aid for microlens array formation using LIGA-like process

Microlens array fabrication using a vacuum suction process combed with the LIGA-like process is presented in this paper. The circular patterned array was designed on a photomask and transferred onto a substrate using photoresist patterning. Electroforming technology was used to convert the photoresist patterns into a metallic molds with an array of nozzles. Liquid JSR resist was spun onto the substrate joining the metallic mold to remove microlens array under vacuum conditions. The exposure energy and vacuum pressure were essential parameters in the microlens array manufacturing process. Microlens arrays with 50 mu m in diameter at -50 cm-Hg vacuum pressure and 100 mu m in diameter at -60 cm-Hg vacuum pressure were successfully formed. The produced microlens arrays presented smooth measured surface profiles coincident with the optical lens geometry

New production method of convex microlens arrays for integrated fluorescence microfluidic detection systems

A new method for producing microlens array with large sag heights is proposed for integrated fluorescence microfluidic detection systems. Three steps in this production technique are included for concave microlens array formations to be integrated into microfluidic systems. First, using the photoresist SU-8 to produce hexagonal microchannel array is required. Second, UV curable glue is injected into the hexagonal microchannel array. Third, the surplus glue is rotated by a spinner at high velocity and exposed to a UV lamp to harden the glue. The micro concave lens molds are then finished and ready to produce convex microlens in poly methsiloxane (PDMS) material. This convex microlens in PDMS can be used for detecting fluorescence in microfluidic channels because a convex microlens plays the light convergence role for optical fiber detection