11 research outputs found
Effects of oxygen coimplantation on the formation of donor centers in erbium-implanted silicon
No full textEffects of oxygen coimplantation on the formation of donor centers in erbium-implanted silicon
No full textEffects of oxygen coimplantation on the formation of donor centers in erbium-implanted silicon
No full textA comparative study of donor formation in dysprosium, holmium, and erbium implanted silicon,
No full textOxygen and erbium related donor centers in Czochralski grown silicon implanted with erbium, (in: Semicond.)
No full textImpurity centers in silicon doped with rare-earth impurities of dysprosium, holmium, erbium, and ytterbium, (In: Semicond.)
No full text
Impurity centers in silicon doped with rare-earth impurities of dysprosium, holmium, erbium, and ytterbium, (article)
No full textOxygen and erbium related donor centers in Czochralski grown silicon implanted with erbium,
No full text
