40 research outputs found
Observation of local lattice tilts in strain-relaxed Si 1-xGex using high resolution channeling contrast microscopy
10.1007/s00339-004-3076-1Applied Physics A: Materials Science and Processing8161163-1166APAM
Diffusion barrier properties of ionized metal plasma deposited tantalum nitride thin films between copper and silicon dioxide
10.1023/A:1013088624226Journal of Materials Science36245845-5851JMTS
The CIBA high resolution RBS facility
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms2491-2 SPEC. ISS.915-91
The impact of layer thickness of IMP-deposited tantalum nitride films on integrity of Cu/TaN/SiO2/Si multilayer structure
10.1016/S0921-5107(01)00618-3Materials Science and Engineering B: Solid-State Materials for Advanced Technology843217-223MSBT
Study on SiNx passivated Cu/Ta/SiO2/Si multilayer structure
10.1023/A:1020096021514Journal of Materials Science37194181-4188JMTS
Determination of local lattice tilt in Si1-xGex virtual substrate using high resolution channeling contrast microscopy
10.1016/j.nimb.2005.01.098Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms2311-4446-451NIMB
Family medicine education in Singapore: A long-standing collaboration between specialists and family physicians
Annals of the Academy of Medicine Singapore372132-135AAMS
Rapid thermal oxidation of radio frequency sputtered polycrystalline Si1-xGex thin films
10.1016/S0038-1101(01)00240-4Solid-State Electronics45111957-1961SSEL
Synthesis of germanium nanocrystals in hafnium aluminum oxide matrix
10.1063/1.2738385Journal of Applied Physics10111-JAPI
Direct measurement of proton-beam-written polymer optical waveguide sidewall morphorlogy using an atomic force microscope
10.1063/1.1784035Applied Physics Letters8581398-1400APPL