2 research outputs found
Low Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System
This paper concerns a new design of RF MEMS switch combined with an
innovative process which enable low actuation voltage (<5V) and avoid stiction.
First, the structure described with principal design issues, the corresponding
anti-stiction system is presented and FEM simulations are done. Then, a short
description of the process flow based on two non polymer sacrificial layers.
Finally, RF measurements are presented and preliminary experimental protocol
and results of anti-stiction validation is detailed. Resulting RF performances
are -30dB of isolation and -0.45dB of insertion loss at 10 GHz.Comment: Submitted on behalf of EDA Publishing Association
(http://irevues.inist.fr/handle/2042/16838
A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications
This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4µm) with low actuation voltage (7,5V). This design presents also a good contact force and improve the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24GHz applications, based on this design, has been simulated