The Casimir force control in nano and micro electromechanical systems

In this thesis we deal with the analysis and measurement of dispersive surface forces, specifically the Casimir force. Applying Lifshitz theory makes it possible to take into account the material optical property and consequently the obtained results are more realistic. We used contact mode atomic force microscopy for measuring the force experimentally. We show how we can tailor the Casimir force with changing optical property by using different materials including gold (Au), Phase-Change-Materials (PCMs) in amorphous and crystalline state, and Silicon Carbide (SiC). The research presented in this thesis is essential for studying the dynamical behavior of MEMS/NEMS and its design, where surface forces are playing a key role. The combined experimental and theoretical progress has allowed researchers to design geometries and materials that may lead to new regimes of operation for nano/micromechanical devices and may also provide new ways to combat unwanted interactions such as ‘stiction’ between moving parts

Influence of low optical frequencies on actuation dynamics of microelectromechanical systems via Casimir forces

The role of the Casimir force on the analysis of microactuators is strongly influenced by the optical properties of interacting materials. Bifurcation and phase portrait analysis were used to compare the sensitivity of actuators when the optical properties at low optical frequencies were modeled using the Drude and Plasma models. Indeed, for metallic systems, which have strong Casimir attraction, the details of the modeling of the low optical frequency regime can be dramatic, leading to predictions of either stable motion or stiction instability. However, this difference is strongly minimized for weakly conductive systems as are the doped insulators making actuation modeling more certain to predict

Casimir and hydrodynamic force influence on microelectromechanical system actuation in ambient conditions

Casimir and hydrodynamic dissipation forces can strongly influence the actuation of microelectromechanical systems in ambient conditions. The dissipative and stiction dynamics of an actuating system is shown to depend on surface physical processes related to fluid slip and the size of the actuating components. Using phase change materials the Casimir force magnitude can be modulated via amorphous-crystalline phase transitions. The dissipative motion between amorphous coated phase change material components can be changed towards stiction upon crystallization and suitable choice of restoring spring constants. By contrast, amorphization can augment switching from stiction to dissipative dynamics. (C) 2014 AIP Publishing LLC

Sensitivity on materials optical properties of single beam torsional Casimir actuation

Here, we investigate the dynamical sensitivity of electrostatic torsional type microelectromechanical systems (MEMS) on the optical properties of interacting materials. This is accomplished by considering the combined effect of mechanical Casimir and electrostatic torques to drive the device actuation. The bifurcation curves and the phase portraits of the actuation dynamics have been analyzed to compare the sensitivity of a single beam torsional device operating between materials with conductivities that differ by several orders of magnitude. It is shown that the range of stable operation of torsional MEMS against stiction instabilities can increase by decreasing the conductivity of interacting materials. Moreover, the introduction of controlled dissipation, corresponding to a finite quality factor, in an otherwise unstable torsional system, could alter an unstable motion towards stiction to dissipative stable motion. Published by AIP Publishing

Casimir forces from conductive silicon carbide surfaces

Samples of conductive silicon carbide (SiC), which is a promising material due to its excellent properties for devices operating in severe environments, were characterized with the atomic force microscope for roughness, and the optical properties were measured with ellipsometry in a wide range of frequencies. The samples show significant far-infrared absorption due to concentration of charge carriers and a sharp surface phonon-polariton peak. The Casimir interaction of SiC with different materials is calculated and discussed. As a result of the infrared structure and beyond to low frequencies, the Casimir force for SiC-SiC and SiC-Au approaches very slowly the limit of ideal metals, while it saturates significantly below this limit if interaction with insulators takes place (SiC-SiO2). At short separations (<10 nm) analysis of the van der Waals force yielded Hamaker constants for SiC-SiC interactions lower but comparable to those of metals, which is of significance to adhesion and surface assembly processes. Finally, bifurcation analysis of microelectromechanical system actuation indicated that SiC can enhance the regime of stable equilibria against stiction

Influence of materials' optical response on actuation dynamics by Casimir forces

The dependence of the Casimir force on the frequency-dependent dielectric functions of interacting materials makes it possible to tailor the actuation dynamics of microactuators. The Casimir force is largest for metallic interacting systems due to the high absorption of conduction electrons in the far-infrared range. For less conductive systems, such as phase change materials or conductive silicon carbide, the reduced force offers the advantage of increased stable operation of MEMS devices against pull-in instabilities that lead to unwanted stiction. Bifurcation analysis with phase portraits has been used to compare the sensitivity of a model actuator when the optical properties are altered