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Micro Thin Film Sensor Embedding in Metal Structures for Rapid Production of Miniature Smart Metal Tooling
In-situ monitoring and control of temperature and strain is important to improve
product quality for numerous mesoscale manufacturing processes. However, it is difficult for
conventional sensors to provide measurements with a high spatial and temporal resolution at
critical locations. This paper studies the fabrication and calibration of micro thin film sensors
embedded in metal structures for miniature tooling applications. Micro thin film sensors have
been successfully fabricated on various metal substrates and advanced embedding techniques
have been developed to ensure sensor function inside metal structures. Specifically, multilayer
dielectric/metal thin film micro sensors were embedded into layered metal structures by
ultrasonic welding (USW). These embedded sensors provided superior spatial and temporal
resolutions. Smart tooling technique will improve safety and reliability significantly for
manufacturing processes.Mechanical Engineerin