Characterisation of volume and surface dielectric barrier discharges in N2_2–O2_2 mixtures using optical emission spectroscopy

A volume and a twin surface dielectric barrier discharge (VDBD and SDBD) are generated in different nitrogen–oxygen mixtures at atmospheric pressure by applying damped sinusoidal voltage waveforms with oscillation periods in the microsecond time scale. Both electrode configurations are located inside vacuum vessels and operated in a controlled atmosphere to exclude the influence of surrounding air. The discharges are characterised with different spatial and temporal resolution by applying absolutely calibrated optical emission spectroscopy in conjunction with numerical simulations and current–voltage measurements. Plasma parameters, namely the electron density and the reduced electric field, and the dissipated power are found to depend strongly on the oxygen content in the working gas mixture. Different spatial and temporal distributions of plasma parameters and dissipated power are explained by surface and residual volume charges for different O$_2$ admixtures due to their effects on the electron recombination rate. Thus, the oxygen admixture is found to strongly influence the breakdown process and plasma conditions of a VDBD and a SDBD

Experimental investigations of plasma dynamics in the hysteresis regime of reactive RF sputter processes

Reactive radio frequency (RF) sputter processes are highly relevant for thin film deposition, but there is no complete understanding of the fundamentals of their operation. While the Berg model describes the hysteresis regime considering the oxygen coverage of the boundary surfaces, a complete fundamental understanding of the plasma–surface interactions and their effects on the discharge is still missing. In this work, we provide such fundamental insights based on an extensive experimental analysis of the physics in the hysteresis regime of magnetized reactive sputter processes, where the same reactive gas admixture can lead to different discharge characteristics depending on the previous state of the plasma. A variety of plasma and surface diagnostics is used to reveal these insights. A low pressure capacitively coupled RF discharge (CCP, 13.56 MHz) with a magnetron-like magnetic field topology adjacent to the target is operated in argon gas with a variable admixture of O$_2$. The applied RF power, the gas flows/pumping speed, as well as the neutral gas pressure are changed systematically to understand the effects of these external control parameters on the hysteresis regime. The magnetic asymmetry effect is found to play an important role, since an axially non-uniform magnetic field is used to realize a local electron confinement at the target. Similar to process control in applications, the DC self-bias is measured to stabilize the surface composition using a feedback controller with the oxygen gas flow as the manipulated variable

Propagation dynamics and interaction of multiple streamers at and above adjacent dielectric pellets in a packed bed plasma reactor

The propagation and interaction between surface streamers propagating over dielectric pellets in a packed bed plasma reactor operated in Helium are studied using phase and space resolved optical emission spectroscopy and simulations. Such a discharge is known to generate cathode directed positive streamers in the gas phase at the positions of minimum electrode gap followed by surface streamers that propagate along the dielectric surface. By systematically varying the gap between neighboring dielectric pellets, we observe that a larger gap between adjacent dielectric pellets enhances plasma emission near the contact points of the dielectric structures. In agreement with the experiment, the simulation results reveal that the gap influences the attraction of streamers towards adjacent dielectric pellets via polarization of the surface material and the repulsion induced by nearby streamers. For a smaller gap, the streamer propagation changes from along the surface to propagation through the volume and back to surface propagation due to a combination of repulsion between adjacent streamers, polarization of adjacent dielectric surfaces, as well as acceleration of electrons from the volume towards the streamer head. For a wider gap, the streamer propagates along the surface, but repulsion by neighboring streamers increases the offset between the streamers. The streamer achieves a higher speed near the contact point earlier in the absence of an adjacent streamer, which indicates the role of mutual streamer interaction via repulsion

μ\mus and ns twin surface dielectric barrier discharges operated in air

Electrode erosion through continual long-timescale operation (60 min) of identical twin surface dielectric barrier discharges (twin SDBDs) powered either by a microsecond ($\mu$s) or a nanosecond timescale (ns) voltage source is investigated. The twin SDBDs are characterized using current–voltage measurements, optical emission spectroscopy, and phase integrated ICCD imaging. The temporally and spatially averaged gas temperature, consumed electric power, and effective discharge parameters (reduced electric field, and electron density) are measured. The μ$\mu$s twin SDBD is shown to operate in a filamentary mode while the ns twin SDBD is shown to operate in a more homogeneous mode (i.e. non filamentary). Despite a similarity of the effective discharge parameters in both the μs and ns twin SDBD, erosion of the nickel coated electrodes caused by operation of the twin SDBD differs strongly. Only the formation of a moderate number of nickel oxide species is observed on the surface of the ns twin SDBD electrodes. In contrast, the nickel coated electrodes are locally melted and considerably higher densities of oxides are observed around the eroded areas of the μs twin SDBD, due to the filamentary nature of the discharge

Frequency coupling in low-pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis

Electron power absorption dynamics is investigated in radio-frequency (RF) argon capacitively coupled plasmas (CCPs) at low pressure (4–70 Pa) excited by a dual-frequency waveform with frequencies of 27.12 MHz and 1.937 MHz. Based on the spatio-temporal dynamics of the ambipolar electric field a novel interpretation of the mechanism of frequency coupling is given, which is not based on the hard wall model, as in previous explanations. Within this framework, frequency coupling arises due to the decreased size of the ambipolar region outside the sheath when the low-frequency sheath is close to its full expansion, which leads to decreased ionization in this region. It is shown, under the circumstances considered here, ohmic power absorption is dominant. The spatio-temporally averaged ambipolar power absorption shows nonmonotonic behaviour as a function of pressure, first increasing, then, after reaching a local maximum, decreasing as the pressure is increased. It is shown, that the reason for this nonmonotonic behaviour is ultimately connected to the frequency coupling mechanism

Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas

In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms as a function of the electrode surface characteristics. For the latter, we consider and vary the coefficients that characterize the elastic reflection of electrons from the surfaces and the ion-induced secondary electron yield. Our investigations are based on particle-in-cell/Monte Carlo collision simulations of the plasma and on a model that aids the understanding of the computational results. Electron reflection from the electrodes is found to slightly affect the discharge asymmetry in the presence of multi-frequency excitation, whereas secondary electrons cause distinct changes to the asymmetry of the plasma as a function of the phase angle between the harmonics of the driving voltage waveform and as a function the number of these harmonics