Interfacial adhesion of compositional gradient ternary FCC alloy films

Combinatorial materials design of thin films allows for the investigation of fundamental mechanic relationships and optimization of thin films for engineering applications. By depositing a wide range of compositions on a single sample, a systematic study of the full alloy composition of particular material system can be investigated for a number of different properties in a relatively short amount of time. Using an integrated shutter controller, specifically designed and manufactured to allow for precise control over coating design, ternary alloys with the full compositional range can be deposited on a single wafer. By specifically programming the shutters it was possible to create multilayered thickness gradients of three elements, which were then annealed to create thin films with a large compositional gradient across the wafer. The adhesion strength of an Al2O3­ ALD coating on two such compositional gradient FCC alloy adhesion layers, AlCuAu and AuAgPd, was investigated as a function of the changing composition. The AlCuAu alloy sample consists of multiple phases and intermetallics across the wafer which are dependent on composition; whereas the AuAgPd alloy is a solid-solution across the compositional gradient. For this investigation, instrumented indentation with a conical diamond tip was used to locally measure the adhesion of the ALD coating with different adhesion layer compositions. By performing small arrays of indents over the surface of the coating, it was possible to test the adhesion-promoting properties of a broad spectrum of interface compositions in a single sample. Please click Additional Files below to see the full abstract

Combinatorial Materials Design Approach to Investigate Adhesion Layer Chemistry for Optimal Interfacial Adhesion Strength

A combinatorial material adhesion study was used to optimize the composition of an adhesion promoting layer for a nanocrystalline diamond (NCD) coating on silicon. Three different adhesion promoting metals, namely W, Cr, and Ta, were selected to fabricate arrays of co-sputtered binary alloy films, with patches of seven different, distinct alloy compositions for each combination, and single element reference films on a single Si wafer (three wafers in total; W–Cr, Cr–Ta, Ta–W). Scratch testing was used to determine the critical failure load and practical work of adhesion for the NCD coatings as a function of adhesion layer chemistry. All tested samples eventually exhibit delamination of the NCD coating, with buckles radiating perpendicularly away from the scratch track. Application of any of the presented adhesion layers yields an increase of the critical failure load for delamination as compared to NCD on Si. While the influence of adhesion layers on the maximum buckle length is less pronounced, shorter buckles are obtained with pure W and Cr–Ta alloy layers. As a general rule, the addition of an adhesion layer showed a 75% improvement in the measured adhesion energies of the NCD films compared to the NCD coating without an adhesion layer, with specific alloys and compositions showing up to 125% increase in calculated practical work of adhesion.H2020 Marie Skłodowska-Curie Action

Combinatorial Materials Design Approach to Investigate Adhesion Layer Chemistry for Optimal Interfacial Adhesion Strength

A combinatorial material adhesion study was used to optimize the composition of an adhesion promoting layer for a nanocrystalline diamond (NCD) coating on silicon. Three different adhesion promoting metals, namely W, Cr, and Ta, were selected to fabricate arrays of co-sputtered binary alloy films, with patches of seven different, distinct alloy compositions for each combination, and single element reference films on a single Si wafer (three wafers in total; W–Cr, Cr–Ta, Ta–W). Scratch testing was used to determine the critical failure load and practical work of adhesion for the NCD coatings as a function of adhesion layer chemistry. All tested samples eventually exhibit delamination of the NCD coating, with buckles radiating perpendicularly away from the scratch track. Application of any of the presented adhesion layers yields an increase of the critical failure load for delamination as compared to NCD on Si. While the influence of adhesion layers on the maximum buckle length is less pronounced, shorter buckles are obtained with pure W and Cr–Ta alloy layers. As a general rule, the addition of an adhesion layer showed a 75% improvement in the measured adhesion energies of the NCD films compared to the NCD coating without an adhesion layer, with specific alloys and compositions showing up to 125% increase in calculated practical work of adhesion