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1 research outputs found
Three-Dimensional Nanofabrication Utilizing Selective Etching of Silicon Induced by Focused Ion Beam Irradiation
Author
Baba A., Bai, D., Sadoh, T., Kenjo
Gianola U.F.
+12Â more
Gibbons J.F., Hechtl, E.O. and Tsu
Iwao MIYAMOTO
Jun TANIGUCHI
Kawasegi N., Shibata, K., Morita,
Kiwamu ASHIDA
MASAHARA M
Noboru MORITA
Noboru TAKANO
Noritaka KAWASEGI
Schmidt B., Bischoff, L. and Teich
Shigeru YAMADA
Tatsuo OYAMA
Publication venue
'Japan Society of Mechanical Engineers'
Publication date
01/01/2006
Field of study
No full text
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