Hollow cathode sustained plasma microjets: Characterization and application to diamond deposition

Extending the principle of operation of hollow cathode microdischarges to a tube geometry has allowed the formation of stable, high-pressure plasma microjets in a variety of gases including Ar, He, and H2. Direct current discharges are ignited between stainless steel capillary tubes (d = 178 µm) which are operated as the cathode and a metal grid or plate that serves as the anode. Argon plasma microjets can be sustained in ambient air with plasma voltages as low as 260 V for cathode-anode gaps of 0.5 mm. At larger operating voltage, this gap can be extended up to several millimeters. Using a heated molybdenum substrate as the anode, plasma microjets in CH4/H2 mixtures have been used to deposit diamond crystals and polycrystalline films. Micro-Raman spectroscopy of these films shows mainly sp3 carbon content with slight shifting of the diamond peak due to internal stresses. Optical emission spectroscopy of the discharges used in the diamond growth experiments confirms the presence of atomic hydrogen and CH radicals

High-pressure micro-discharges in etching and deposition applications

High-pressure micro-discharges are promising sources of light, ions, and radicals and offer some advantages in materials processing applications as compared to other more conventional discharges. We review here results from etching experiments using stencil masks where the discharge is formed only in the pattern cutout. The mask consists of a thin metal-dielectric structure and is pressed against a Si wafer, which becomes part of the electric circuit. Pattern transfer takes place, albeit the profile shape appears to be limited by the expansion of the plasma into the etched hole at long etch times. We also review experiments on using micro-discharges as sources of radicals for materials deposition applications. In the latter case, the micro-discharges form in metal capillary tubes permitting incorporation of gas flow and a short reaction zone that can be controlled to favour production of specific radicals. We demonstrate these concepts by using CH4/H2 chemistry for diamond deposition on a heated Mo substrate. Good quality micro- and nano-diamond crystals could be produced

Argon excimer emission from high-pressure microdischarges in metal capillaries

We report on argon excimer emission from high-pressure microdischarges formed inside metal capillaries with or without gas flow. Excimer emission intensity from a single tube increases linearly with gas pressure between 400 and 1000 Torr. Higher discharge current also results in initial intensity gains until gas heating causes saturation or intensity drop. Argon flow through the discharge intensifies emission perhaps by gas cooling. Emission intensity was found to be additive in prealigned dual microdischarges, suggesting that an array of microdischarges could produce a high-intensity excimer source

Adaptive Pole Placement Control of Nonlinear Systems

Mechanical Engineerin

Synthesis of Blue Luminescent Si Nanoparticles Using Atmospheric-Pressure Microdischarges

Silicon nanoparticles are synthesized from a mixture of argon/silane in a continuous flow atmospheric-pressure microdischarge reactor. Particles nucleate and grow to a few nanometers (1−3 nm) in diameter before their growth is abruptly terminated in the short residence time microreactor. Narrow size distributions are obtained as inferred from size classification and imaging. As-grown Si nanoparticles collected in solution exhibit room-temperature photoluminescence that peaks at 420 nm with a quantum efficiency of 30%; the emission is stable for months in ambient air

Formation of nanodiamonds at near-ambient conditions via microplasma dissociation of ethanol vapour

Clusters of diamond-phase carbon, known as nanodiamonds, exhibit novel mechanical, optical and biological properties that have elicited interest for a wide range of technological applications. Although diamond is predicted to be more stable than graphite at the nanoscale, extreme environments are typically used to produce nanodiamonds. Here we show that nanodiamonds can be stably formed in the gas phase at atmospheric pressure and neutral gas temperatures \u3c100 °C by dissociation of ethanol vapour in a novel microplasma process. Addition of hydrogen gas to the process allows in flight purification by selective etching of the non-diamond carbon and stabilization of the nanodiamonds. The nanodiamond particles are predominantly between 2 and 5 nm in diameter, and exhibit cubic diamond, n-diamond and lonsdaleite crystal structures, similar to nanodiamonds recovered from meteoritic residues. These results may help explain the origin of nanodiamonds in the cosmos, and offer a simple and inexpensive route for the production of high-purity nanodiamonds

System and method for making nanoparticles using atmospheric-pressure plasma microreactor

A system and method for making nanoparticles. The system includes a first cathode including a first metal tube associated with a first end and a second end, a first anode including a second metal tube associated with a third end and a fourth end, and a first container including a first gas inlet. The first end and the third end are located inside the first container. The first end and the third end are separated by a first gap, the first metal tube is configured to allow a first gas to flow from the second end to the first end, and the first container is configured to allow a second gas to flow from the first gas inlet into the second metal tube through at least a first part of the first gap