A picogram and nanometer scale photonic crystal opto-mechanical cavity

We describe the design, fabrication, and measurement of a cavity opto-mechanical system consisting of two nanobeams of silicon nitride in the near-field of each other, forming a so-called "zipper" cavity. A photonic crystal patterning is applied to the nanobeams to localize optical and mechanical energy to the same cubic-micron-scale volume. The picrogram-scale mass of the structure, along with the strong per-photon optical gradient force, results in a giant optical spring effect. In addition, a novel damping regime is explored in which the small heat capacity of the zipper cavity results in blue-detuned opto-mechanical damping.Comment: 15 pages, 4 figure

Minimization of phonon-tunneling dissipation in mechanical resonators

Micro- and nanoscale mechanical resonators have recently emerged as ubiquitous devices for use in advanced technological applications, for example in mobile communications and inertial sensors, and as novel tools for fundamental scientific endeavors. Their performance is in many cases limited by the deleterious effects of mechanical damping. Here, we report a significant advancement towards understanding and controlling support-induced losses in generic mechanical resonators. We begin by introducing an efficient numerical solver, based on the "phonon-tunneling" approach, capable of predicting the design-limited damping of high-quality mechanical resonators. Further, through careful device engineering, we isolate support-induced losses and perform the first rigorous experimental test of the strong geometric dependence of this loss mechanism. Our results are in excellent agreement with theory, demonstrating the predictive power of our approach. In combination with recent progress on complementary dissipation mechanisms, our phonon-tunneling solver represents a major step towards accurate prediction of the mechanical quality factor.Comment: 12 pages, 4 figure

A microchip optomechanical accelerometer

The monitoring of accelerations is essential for a variety of applications ranging from inertial navigation to consumer electronics. The basic operation principle of an accelerometer is to measure the displacement of a flexibly mounted test mass; sensitive displacement measurement can be realized using capacitive, piezo-electric, tunnel-current, or optical methods. While optical readout provides superior displacement resolution and resilience to electromagnetic interference, current optical accelerometers either do not allow for chip-scale integration or require bulky test masses. Here we demonstrate an optomechanical accelerometer that employs ultra-sensitive all-optical displacement read-out using a planar photonic crystal cavity monolithically integrated with a nano-tethered test mass of high mechanical Q-factor. This device architecture allows for full on-chip integration and achieves a broadband acceleration resolution of 10 \mu g/rt-Hz, a bandwidth greater than 20 kHz, and a dynamic range of 50 dB with sub-milliwatt optical power requirements. Moreover, the nano-gram test masses used here allow for optomechanical back-action in the form of cooling or the optical spring effect, setting the stage for a new class of motional sensors.Comment: 16 pages, 9 figure

Back-action Evading Measurements of Nanomechanical Motion

When performing continuous measurements of position with sensitivity approaching quantum mechanical limits, one must confront the fundamental effects of detector back-action. Back-action forces are responsible for the ultimate limit on continuous position detection, can also be harnessed to cool the observed structure, and are expected to generate quantum entanglement. Back-action can also be evaded, allowing measurements with sensitivities that exceed the standard quantum limit, and potentially allowing for the generation of quantum squeezed states. We realize a device based on the parametric coupling between an ultra-low dissipation nanomechanical resonator and a microwave resonator. Here we demonstrate back-action evading (BAE) detection of a single quadrature of motion with sensitivity 4 times the quantum zero-point motion, back-action cooling of the mechanical resonator to n = 12 quanta, and a parametric mechanical pre-amplification effect which is harnessed to achieve position resolution a factor 1.3 times quantum zero-point motion.Comment: 19 pages (double-spaced) including 4 figures and reference

Size modulated transition in the fluid-structure interaction losses in nano mechanical beam resonators

An understanding of the dominant dissipative mechanisms is crucial for the design of a high-Q doubly clamped nanobeam resonator to be operated in air. We focus on quantifying analytically the viscous losses-the squeeze film damping and drag force damping-that limit the net quality factor of a beam resonator, vibrating in its flexural fundamental mode with the surrounding fluid as air at atmospheric pressure. Specifically, drag force damping dominates at smaller beam widths and squeeze film losses dominate at larger beam widths, with no significant contribution from structural losses and acoustic radiation losses. The combined viscous losses agree well with the experimentally measured Q of the resonator over a large range of beam widths, within the limits of thin beam theory. We propose an empirical relation between the maximum quality factor and the ratio of maximum beam width to the squeeze film air gap thickness. Published by AIP Publishing

Electrospun light-emitting nanofibers

We have electrospun light-emitting nanofibers from ruthenium(II) tris(bipyridine)/polyethylene oxide mixtures. The electroluminescent fibers were deposited on gold interdigitated electrodes and lit in a nitrogen atmosphere. The fibers showed light emission at low operating voltages (3-4 V), with turn-on voltages approaching the band gap limit of the organic semiconductor. Because of the fiber size, emission from electrospun light-emitting nanofibers is confined to nanoscale dimensions, an attractive feature for sensing applications and lab-on-a-chip integration where highly localized excitation of molecules is required. © 2007 American Chemical Society

Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime

Proceedings of the Society for Experimental Mechanics, Inc.6591-10