5 research outputs found
Aromatic fluoroderivatives. XCV. The investigation of the behaviour of the polyfluoroaromatic compounds containing group VA elements in acid media
Full text linkPhotochemistry of copper(II) polyfluorocarboxylates and copper(II) acetate as their hydrocarbon analogues
Full text linkThe investigation of the electronic structure of polyfluoroaromatic phosphines by means of x-ray fluorescent and ultraviolet (He I) photoelectron spectroscopy
Full text linkElectronic stricture and reactivity of phenyl and pentafluorophenylsubstituted N,N-dichloroamides and -amines
Full text link(HFA)Cu . 1,5-COD as the prospective precursor for CVD-technologies : The electronic structure, thermodynamical properties and process of formation of thin copper films
No full textThe properties of (HFA)Cu . l,5-COD complex, being the prospective CVD-precursor for thin copper films for microelectronics, were investigated by UV (He 1) photoelectron, X-ray fluorescent spectroscopy and mass-spectroscopy together with ab initio calculations in approximation of density functional theory. The detailed analysis of energy and structure of highest occupied MO'S of (HFA)Cu . 1,5-COD was carried out. The thermodynamical and kinetical parameters of thermolysis reaction for (HFA)Cu . l,5-COD were determined and discussed. The initial stages of growth of thin copper films on the basis of this precursor (Si3N4 substrates) were studied by high-resolution transmission electron microscopy and X-ray photoelectron spectroscopy
