Study of a micro chamber quadrupole mass spectrometer

Copyright @ 2008 American Vacuum Society / American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films, 26(2), Article number 239 and may be found at http://scitation.aip.org/content/avs/journal/jvsta/26/2/10.1116/1.2827512.The design of a micro chamberquadrupolemass spectrometer (MCQMS) having a small total volume of only 20 cm3, including Faraday cup ion detector and ion source, is described. This MCQMS can resist a vacuum baking temperature of 400–500 °C. The quadrupole elements with a hyperbolic surface are made of a ceramic material and coated with a thin metal layer. The quadrupole mass filter has a field radius of 3 mm and a length of 100 mm. Prototypes of this new MCQMS can detect a minimum partial pressure of 10−8 Pa, have a peak width of ΔM=1 at 10% peak height from mass number 1 to 60, and show an excellent long-term stability. The new MCQMS is intended to be used in residual gas analyses of electron devices during a mutual pumping and baking process.National Key Basic Research Program, the Chinese 111 Project Grant and Program for New Century Excellent Talents in University