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1 research outputs found
Growth and Comparison of Residual Stress of AlN Films on Silicon (100), (110) and (111) Substrates
Author
A Ababneh
A Pandey
+49Â more
AF Wright
Akhilesh Pandey
Ashok Kumar Kapoor
AV Singh
C Mirpuri
CH Ma
D Magnfält
Davinder Kaur
E Valcheva
EI Bienk
F Engelmark
F Randreiamora
G Este
GF Iriarte
GG Stoney
HY Liu
JH Edgar
JX Zhang
K Kim
K Tonisch
L Zhang
MA Moreira
MD Ramos
MJ Madau
N Sinha
P Kung
P Pobedinskas
R Ruh
R. Raman
Ravi Prakash
RE Sah
S Dutta
S Dutta
S Dutta
S Khan
S Stritc
S Tanaka
Shankar Dutta
T Aubert
T Huang
T Prokofyeva
TP Drusedau
V Felmetsger
V Lughi
WA Kern
XH Ji
Y Okada
Y Wang
YH Kim
Publication venue
'Springer Science and Business Media LLC'
Publication date
Field of study
No full text
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