Off-axis reflection zone plate for quantitative soft x-ray source characterization

A compact system for high-resolution spectroscopy and quantitative photon flux and brilliance measurements of pulsed soft x-ray sources is described. The calibrated system combines a novel elliptical off-axis reflection zone plate with charge-coupled device detection for simultaneous spectral and spatial measurements. Experiments on a water-window droplet-target laser-plasma source demonstrate lambda/Delta lambda greater than or equal to 1000 spectral resolution and absolute flux and brilliance measurements. (C) 1997 American Institute of Physics

A new laser-plasma X-ray source for microscopy and lithography

A new high-brightness source for soft X-rays and EUV-radiation has been developed. This laser-plasma source utilizes a microscopic liquid droplet or jet as target. The result is a reduction of debris emission by several orders of magnitude compared to conventional laser plasmas. The minute amounts of residual ionic/atomic debris can be obstructed by filters or a localized gas shield. Target liquids which only form gaseous compounds after evaporation yield debris-free operation. The negligible debris emission in combination with narrow-bandwidth line radiation, high-brightness, high spatial stability, excellent geometric access and the possibility to perform uninterrupted target generation for high repetition-rate lasers, makes this source suitable for table-top X-ray microscopy and lithography. The initial development of the condenser arrangement for a table-top water-window X-ray microscope is described