Development of 146nm Vacuum UV Light Source

AbstractThe principle of dielectric-barrier discharge (DBD) producing 146nm vacuum ultraviolet (VUV) light is introduced in this article. MgF2 and Kr are used as the output window and the discharge gas, respectively, in the VUV light source. Fairly wide, narrow-bandwidth UV light could be generated with peak wavelength of 146nm and a full width at half maxima of 12nm. In addition, the impact of air pressure, voltage amplitude and frequency to the light source is also analyzed