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    STRONG POSITIONS IN THE NOVEL LUST BY E. JELINEK AND THEIR TRANSLATION

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    Π’ настоящСй ΡΡ‚Π°Ρ‚ΡŒΠ΅ рассматриваСтся Ρ„ΡƒΠ½ΠΊΡ†ΠΈΠΎΠ½Π°Π»ΡŒΠ½Π°Ρ Π½Π°Π³Ρ€ΡƒΠ·ΠΊΠ° ΡΠΈΠ»ΡŒΠ½Ρ‹Ρ… ΠΏΠΎΠ·ΠΈΡ†ΠΈΠΉ тСкста Π² худоТСствСнном дискурсС ΠΈ ΠΎΠΏΠΈΡΡ‹Π²Π°ΡŽΡ‚ΡΡ ΠΏΡ€ΠΈΠ΅ΠΌΡ‹ ΠΈΡ… прагматичСской Π°Π΄Π°ΠΏΡ‚Π°Ρ†ΠΈΠΈ ΠΏΡ€ΠΈ ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄Π΅.Π‘ΠΈΠ»ΡŒΠ½Ρ‹Π΅ ΠΏΠΎΠ·ΠΈΡ†ΠΈΠΈ, ΠΊ ΠΊΠΎΡ‚ΠΎΡ€Ρ‹ΠΌ принято ΠΎΡ‚Π½ΠΎΡΠΈΡ‚ΡŒ Π·Π°Π³Π»Π°Π²ΠΈΠ΅, эпиграф, Π½Π°Ρ‡Π°Π»ΠΎ ΠΈ ΠΊΠΎΠ½Π΅Ρ† тСкста, ΠΈΠΌΠ΅ΡŽΡ‚ ΠΎΠ³Ρ€ΠΎΠΌΠ½ΠΎΠ΅ Π·Π½Π°Ρ‡Π΅Π½ΠΈΠ΅ для ΠΎΡ€Π³Π°Π½ΠΈΠ·Π°Ρ†ΠΈΠΈ, восприятия ΠΈ ΠΈΠ½Ρ‚Π΅Ρ€ΠΏΡ€Π΅Ρ‚Π°Ρ†ΠΈΠΈ тСкста. ИмСнно ΠΎΠ½ΠΈ, структурируя ΡΠΎΠ΄Π΅Ρ€ΠΆΠ°Ρ‰ΡƒΡŽΡΡ Π² тСкстС ΠΈΠ½Ρ„ΠΎΡ€ΠΌΠ°Ρ†ΠΈΡŽ, ΠΏΡ€ΠΈΠ²Π»Π΅ΠΊΠ°ΡŽΡ‚ Π²Π½ΠΈΠΌΠ°Π½ΠΈΠ΅ читатСля, ΠΏΠΎΠ΄Π³ΠΎΡ‚Π°Π²Π»ΠΈΠ²Π°ΡŽΡ‚ Π΅Π³ΠΎ ΠΊ Π²ΠΎΡΠΏΡ€ΠΈΡΡ‚ΠΈΡŽ ΠΈΠ½Ρ„ΠΎΡ€ΠΌΠ°Ρ†ΠΈΠΈ, Π° выраТая Π°Π²Ρ‚ΠΎΡ€ΡΠΊΡƒΡŽ ΠΈΠ½Ρ‚Π΅Π½Ρ†ΠΈΡŽ, ΠΏΠΎΠΌΠΎΠ³Π°ΡŽΡ‚ ΡΠ΄Π΅Π»Π°Ρ‚ΡŒ Π²Ρ‹Π²ΠΎΠ΄Ρ‹ ΠΈΠ· содСрТания ΠΏΡ€ΠΎΡ‡ΠΈΡ‚Π°Π½Π½ΠΎΠ³ΠΎ тСкста.Как ΠΏΡ€Π°Π²ΠΈΠ»ΠΎ, исслСдования ΡΠΈΠ»ΡŒΠ½Ρ‹Ρ… ΠΏΠΎΠ·ΠΈΡ†ΠΈΠΉ проводятся Π½Π° ΠΌΠ°Ρ‚Π΅Ρ€ΠΈΠ°Π»Π΅ ΠΎΠ΄Π½ΠΎΠ³ΠΎ языка ΠΈ ΠΎΠ³Ρ€Π°Π½ΠΈΡ‡ΠΈΠ²Π°ΡŽΡ‚ΡΡ выявлСниСм ΠΈΡ… Ρ„ΡƒΠ½ΠΊΡ†ΠΈΠΉ. Π’ Π΄Π°Π½Π½ΠΎΠΉ ΡΡ‚Π°Ρ‚ΡŒΠ΅ ΡΠΈΠ»ΡŒΠ½Ρ‹Π΅ ΠΏΠΎΠ·ΠΈΡ†ΠΈΠΈ ΡΡ€Π°Π²Π½ΠΈΠ²Π°ΡŽΡ‚ΡΡ Π² исходном тСкстС ΠΈ ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄Π΅, Ρ‡Ρ‚ΠΎ ΠΈ обусловило Π½ΠΎΠ²ΠΈΠ·Π½Ρƒ ΠΏΠΎΠ΄Ρ…ΠΎΠ΄Π° ΠΊ ΠΈΡ… ΠΈΠ·ΡƒΡ‡Π΅Π½ΠΈΡŽ. ΠœΠ°Ρ‚Π΅Ρ€ΠΈΠ°Π»ΠΎΠΌ послуТил Ρ€ΠΎΠΌΠ°Π½ Π­Π»ΡŒΡ„Ρ€ΠΈΠ΄Ρ‹ Π•Π»ΠΈΠ½Π΅ΠΊ Β«ΠŸΠΎΡ…ΠΎΡ‚ΡŒΒ» ΠΈ Π΅Π³ΠΎ ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄, Π²Ρ‹ΠΏΠΎΠ»Π½Π΅Π½Π½Ρ‹ΠΉ А.Π’. Π‘Π΅Π»ΠΎΠ±Ρ€Π°Ρ‚ΠΎΠ²Ρ‹ΠΌ. ΠΠΊΡ‚ΡƒΠ°Π»ΡŒΠ½ΠΎΡΡ‚ΡŒ Π΄Π°Π½Π½ΠΎΠΉ Ρ€Π°Π±ΠΎΡ‚Ρ‹ Π·Π°ΠΊΠ»ΡŽΡ‡Π°Π΅Ρ‚ΡΡ Π² ΠΈΠ·ΡƒΡ‡Π΅Π½ΠΈΠΈ прагматичСского ΠΏΠΎΡ‚Π΅Π½Ρ†ΠΈΠ°Π»Π° ΡΠΈΠ»ΡŒΠ½Ρ‹Ρ… ΠΏΠΎΠ·ΠΈΡ†ΠΈΠΉ тСкста для раскрытия авторской ΠΈΠ½Ρ‚Π΅Π½Ρ†ΠΈΠΈ Π½Π° ΠΌΠ°Ρ‚Π΅Ρ€ΠΈΠ°Π»Π΅ Ρ€ΠΎΠΌΠ°Π½Π° Π­. Π•Π»ΠΈΠ½Π΅ΠΊ.ΠžΠ±ΡŠΠ΅ΠΊΡ‚ΠΎΠΌ исслСдования ΡΠ²Π»ΡΡŽΡ‚ΡΡ ΡΠΈΠ»ΡŒΠ½Ρ‹Π΅ ΠΏΠΎΠ·ΠΈΡ†ΠΈΠΈ тСкста-ΠΎΡ€ΠΈΠ³ΠΈΠ½Π°Π»Π° ΠΈ тСкста-ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄Π°.ЦСлью Π΄Π°Π½Π½ΠΎΠΉ ΡΡ‚Π°Ρ‚ΡŒΠΈ являСтся Π°Π½Π°Π»ΠΈΠ· Ρ„ΡƒΠ½ΠΊΡ†ΠΈΠΎΠ½Π°Π»ΡŒΠ½ΠΎΠΉ Π½Π°Π³Ρ€ΡƒΠ·ΠΊΠΈ ΡΠΈΠ»ΡŒΠ½Ρ‹Ρ… ΠΏΠΎΠ·ΠΈΡ†ΠΈΠΉ Π² тСкстС ΠΎΡ€ΠΈΠ³ΠΈΠ½Π°Π»Π° Ρ€ΠΎΠΌΠ°Π½Π° Π­. Π•Π»ΠΈΠ½Π΅ΠΊ Β«ΠŸΠΎΡ…ΠΎΡ‚ΡŒΒ» ΠΈ Π² тСкстС ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄Π°. Для достиТСния ΡƒΠΊΠ°Π·Π°Π½Π½ΠΎΠΉ Ρ†Π΅Π»ΠΈ Π½Π΅ΠΎΠ±Ρ…ΠΎΠ΄ΠΈΠΌΠΎ Π±Ρ‹Π»ΠΎ Ρ€Π΅ΡˆΠΈΡ‚ΡŒ ΡΠ»Π΅Π΄ΡƒΡŽΡ‰ΠΈΠ΅ Π·Π°Π΄Π°Ρ‡ΠΈ: ΠΎΠΏΠΈΡΠ°Ρ‚ΡŒ Ρ„ΡƒΠ½ΠΊΡ†ΠΈΠΈ ΡΠΈΠ»ΡŒΠ½Ρ‹Ρ… ΠΏΠΎΠ·ΠΈΡ†ΠΈΠΉ, ΠΎΠΏΡ€Π΅Π΄Π΅Π»ΠΈΡ‚ΡŒ ΠΏΡ€ΠΈΠ΅ΠΌΡ‹ ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄Π° ΠΈ ΠΎΡ†Π΅Π½ΠΈΡ‚ΡŒ Π²ΠΎΠ·ΠΌΠΎΠΆΠ½ΠΎΡΡ‚ΡŒ/Π½Π΅Π²ΠΎΠ·ΠΌΠΎΠΆΠ½ΠΎΡΡ‚ΡŒ ΠΈΡ… ΠΏΠ΅Ρ€Π΅Π΄Π°Ρ‡ΠΈ ΠΏΡ€ΠΈ Ρ€Π΅Π°Π»ΠΈΠ·Π°Ρ†ΠΈΠΈ прагматичСской Π°Π΄Π°ΠΏΡ‚Π°Ρ†ΠΈΠΈ.ΠœΠ΅Ρ‚ΠΎΠ΄ΠΎΠ»ΠΎΠ³ΠΈΡ‡Π΅ΡΠΊΠΎΠΉ основой исслСдования ΡΠ²Π»ΡΡŽΡ‚ΡΡ основныС полоТСния Ρ‚Π΅ΠΎΡ€ΠΈΠΈ тСкста, лингвистичСского Π°Π½Π°Π»ΠΈΠ·Π° худоТСствСнного тСкста, Ρ€Π°Π·Ρ€Π°Π±ΠΎΡ‚ΠΊΠΈ соврСмСнного отСчСствСнного ΠΈ Π·Π°Ρ€ΡƒΠ±Π΅ΠΆΠ½ΠΎΠ³ΠΎ пСрСводовСдСния, ΠΎΠΏΡ€Π΅Π΄Π΅Π»ΡΡŽΡ‰ΠΈΠ΅ ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄ ΠΊΠ°ΠΊ ΠΊΠΎΠΌΠΌΡƒΠ½ΠΈΠΊΠ°Ρ‚ΠΈΠ²Π½Ρ‹ΠΉ Π°ΠΊΡ‚, Ρ€Π΅Π·ΡƒΠ»ΡŒΡ‚Π°Ρ‚ ΠΊΠΎΡ‚ΠΎΡ€ΠΎΠ³ΠΎ обусловлСн ΠΊΠ°ΠΊ лингвистичСскими, Ρ‚Π°ΠΊ ΠΈ экстралингвистичСскими Ρ„Π°ΠΊΡ‚ΠΎΡ€Π°ΠΌΠΈ.ΠœΠ΅Ρ‚ΠΎΠ΄Ρ‹ исслСдования: ΠΊΠΎΠ½Ρ‚Π΅ΠΊΡΡ‚ΡƒΠ°Π»ΡŒΠ½Ρ‹ΠΉ Π°Π½Π°Π»ΠΈΠ·, ΡΠΎΠΏΠΎΡΡ‚Π°Π²ΠΈΡ‚Π΅Π»ΡŒΠ½Ρ‹ΠΉ Π°Π½Π°Π»ΠΈΠ· исходного ΠΈ ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄Π½ΠΎΠ³ΠΎ тСкста с ΠΏΠΎΡΠ»Π΅Π΄ΡƒΡŽΡ‰ΠΈΠΌ Π°Π½Π°Π»ΠΈΠ·ΠΎΠΌ ΠΏΡ€ΠΈΠ΅ΠΌΠΎΠ² ΠΏΠ΅Ρ€Π΅Π΄Π°Ρ‡ΠΈ ΠΎΡ‚Π½ΠΎΡˆΠ΅Π½ΠΈΠΉ ΠΌΠ΅ΠΆΠ΄Ρƒ ΠΎΡ€ΠΈΠ³ΠΈΠ½Π°Π»ΠΎΠΌ ΠΈ ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄ΠΎΠΌ Π½Π° ΠΊΠΎΠΌΠΌΡƒΠ½ΠΈΠΊΠ°Ρ‚ΠΈΠ²Π½ΠΎ-прагматичСском ΡƒΡ€ΠΎΠ²Π½Π΅.ИсслСдованиС ΠΏΠΎΠΊΠ°Π·Π°Π»ΠΎ, Ρ‡Ρ‚ΠΎ основной ΠΏΡ€ΠΎΠ±Π»Π΅ΠΌΠΎΠΉ ΠΈ ΡΠ»ΠΎΠΆΠ½ΠΎΡΡ‚ΡŒΡŽ для ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄Ρ‡ΠΈΠΊΠ° являСтся Π½Π΅ Ρ‚ΠΎΠ»ΡŒΠΊΠΎ языковой ΠΌΠ°Ρ‚Π΅Ρ€ΠΈΠ°Π» исходного тСкста, сколько Π½Π΅ΠΎΠ±Ρ…ΠΎΠ΄ΠΈΠΌΠΎΡΡ‚ΡŒ сохранСния Ρ„ΡƒΠ½ΠΊΡ†ΠΈΠΉ ΡΠΈΠ»ΡŒΠ½Ρ‹Ρ… ΠΏΠΎΠ·ΠΈΡ†ΠΈΠΉ. Для этого ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄Ρ‡ΠΈΠΊ обращаСтся ΠΊ Ρ‚Π΅ΠΌ ΠΏΡ€ΠΈΠ΅ΠΌΠ°ΠΌ, ΠΊΠΎΡ‚ΠΎΡ€Ρ‹Π΅ позволят Π΅ΠΌΡƒ ΡΠΎΡ…Ρ€Π°Π½ΠΈΡ‚ΡŒ прагматичСский ΠΏΠΎΡ‚Π΅Π½Ρ†ΠΈΠ°Π» ΠΎΡ€ΠΈΠ³ΠΈΠ½Π°Π»Π° ΠΈ донСсти Π΅Π³ΠΎ Π΄ΠΎ Ρ€Π΅Ρ†ΠΈΠΏΠΈΠ΅Π½Ρ‚Π° ΠΏΡ€ΠΈΠ½ΠΈΠΌΠ°ΡŽΡ‰Π΅ΠΉ ΠΊΡƒΠ»ΡŒΡ‚ΡƒΡ€Ρ‹. Π­Ρ‚ΠΎ ΠΏΠΎΠ΄Π±ΠΎΡ€ прямого соотвСтствия, лСксичСскиС ΠΈ грамматичСскиС Π·Π°ΠΌΠ΅Π½Ρ‹, смысловоС Ρ€Π°Π·Π²ΠΈΡ‚ΠΈΠ΅, компСнсация ΠΈ Π΄Ρ€.ΠŸΡ€ΠΈ ΡƒΡΠΏΠ΅ΡˆΠ½ΠΎΠΌ ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄Π΅ ΡΠΈΠ»ΡŒΠ½Ρ‹Ρ… ΠΏΠΎΠ·ΠΈΡ†ΠΈΠΉ ΠΈ Π½Π° читатСля тСкста-ΠΎΡ€ΠΈΠ³ΠΈΠ½Π°Π»Π° ΠΈ Π½Π° Ρ€Π΅Ρ†ΠΈΠΏΠΈΠ΅Π½Ρ‚ ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄Π° происходит ΠΎΠ΄ΠΈΠ½Π°ΠΊΠΎΠ²ΠΎΠ΅ ΠΈΠ΄Π΅ΠΉΠ½ΠΎΠ΅, ΡΠΌΠΎΡ†ΠΈΠΎΠ½Π°Π»ΡŒΠ½ΠΎΠ΅ ΠΈ эстСтичСскоС воздСйствиС, нСсмотря Π½Π° Ρ‚ΠΎ, Ρ‡Ρ‚ΠΎ Π² Ρ€Π°Π·Π½Ρ‹Ρ… ΠΊΡƒΠ»ΡŒΡ‚ΡƒΡ€Π°Ρ… ΠΎΠ½ΠΎ Π²Π΅Ρ€Π±Π°Π»ΠΈΠ·ΠΎΠ²Π°Π½ΠΎ Ρ€Π°Π·Π½Ρ‹ΠΌΠΈ языковыми срСдствами.Π’ Ρ…ΠΎΠ΄Π΅ Π°Π½Π°Π»ΠΈΠ·Π° Π±Ρ‹Π»ΠΎ выявлСно, Ρ‡Ρ‚ΠΎ ΡΠΈΠ»ΡŒΠ½Ρ‹Π΅ ΠΏΠΎΠ·ΠΈΡ†ΠΈΠΈ ΠΌΠΎΠ³ΡƒΡ‚ Π±Ρ‹Ρ‚ΡŒ ΠΏΠ΅Ρ€Π΅Π΄Π°Π½Ρ‹ Π² ΠΏΠΎΠ»Π½ΠΎΠΌ объСмС ΠΏΡ€ΠΈ условии Ρ€Π΅Π°Π»ΠΈΠ·Π°Ρ†ΠΈΠΈ прагматичСской Π°Π΄Π°ΠΏΡ‚Π°Ρ†ΠΈΠΈ.Π Π΅Π·ΡƒΠ»ΡŒΡ‚Π°Ρ‚Ρ‹ Π΄Π°Π½Π½ΠΎΠ³ΠΎ исслСдования ΠΈΠΌΠ΅ΡŽΡ‚ ΠΏΡ€Π°ΠΊΡ‚ΠΈΡ‡Π΅ΡΠΊΡƒΡŽ Π½Π°ΠΏΡ€Π°Π²Π»Π΅Π½Π½ΠΎΡΡ‚ΡŒ, Ρ‚.ΠΊ. ΠΎΠ½ΠΈ ΠΌΠΎΠ³ΡƒΡ‚ Π±Ρ‹Ρ‚ΡŒ ΠΈΡΠΏΠΎΠ»ΡŒΠ·ΠΎΠ²Π°Π½Ρ‹ ΠΏΡ€ΠΈ рассмотрСнии ΡˆΠΈΡ€ΠΎΠΊΠΎΠ³ΠΎ ΠΊΡ€ΡƒΠ³Π° ΠΏΡ€ΠΎΠ±Π»Π΅ΠΌ ΠΏΡ€ΠΈΠΊΠ»Π°Π΄Π½ΠΎΠ³ΠΎ Ρ…Π°Ρ€Π°ΠΊΡ‚Π΅Ρ€Π° Π² Ρ‚Π΅ΠΎΡ€ΠΈΠΈ тСкста, Ρ‚Π΅ΠΎΡ€ΠΈΠΈ ΠΏΠ΅Ρ€Π΅Π²ΠΎΠ΄Π°.In this paper, we consider the functional load of strong positions of text in artistic discourse and describe the techniques for their pragmatic adaptation in translation.The title, epigraph, beginning and end of the text are referred to as strong positions, being of great importance for the organization, perception and interpretation of the text. The strong positions structure the information that the text contains, attract the reader’s attention, prepare them for the perception of information, as well as the way the author’s intention is expressed, help to draw conclusions from the content of the read text upon reading.As a rule, their studies are conducted on the basis of one language and are limited to identifying their functions. In this article, strong positions are compared in the original text and translation, which is why the novelty of the approach to their study has become evident. The material was a novel Lust by Elfriede Jelinek and its translation by A. Belobratov.The subject of the study are the strong positions in both the original text and in the translated one.The purpose of this article is to analyze the functional load of strong positions in the above-mentioned text and in the text of the translation. To achieve this goal, it was necessary to do the following tasks: describe the functions of strong positions, determine the methods of translation and assess the possibility / impossibility of their transfer in the implementation of pragmatic adaptation.The main principles of the theory of the text, linguistic analysis of the artistic text, development of modern Russian and foreign translation studies, which determine the translation as a communicative act, the result of which is determined by both linguistic and extralinguistic factors, constitute the methodological basis of the research.The following research method were used: the contextual analysis, comparative analysis of the source and translated text, followed by the analysis of the methods of transferring the relation between the original text and its translation at a communicative-pragmatic level.The study showed that the main problem and complexity for the translator is not only the language material of the source text, but also the need to preserve the functions of strong positions. In order to achieve this, the translator refers to those techniques that allow them to preserve the pragmatic potential of the original text and bring it to the recipient of the receiving culture, i.e. a set of direct correspondence, lexical and grammatical substitutions, semantic development, compensation, etc.With the successful transfer of strong positions, both the reader of the original text and the recipient of the translation get a similar ideological, emotional and esoteric impact, despite the fact that in different cultures it is verbalized by using different linguistic means.In the course of the analysis, it was revealed that strong positions can be transferred in full provided that pragmatic adaptation has been implemented.The results of this study can be used when considering the problems of text theory, the theory of translation in applied aspects

    VISUALIZATION IN NANOTECHNOLOGY: LOW-K MATERIALS

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    Reactive pathways of hydrogen and carbon removal from organosilicate glass low-

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    Direct molecular dynamic simulation on the base of the density functional theory (DFT) method is used to study some critical reactions of F atoms with organosilicate glass (OSG) low-ΞΊ films. Here static and dynamic DFT-based approaches are applied for a variety of reactive pathways of hydrogen and carbon removal in the form of volatile products (HF, CF2 and CF3 molecules) from initial SiCH3 surface groups. These reactions constitute an important part of the proposed multi-step mechanism of OSG films damage and etching by thermal F atoms. Two models (POSS and TMCTS macromolecules and their modifications) are used to illustrate the peculiarities and dynamics of the successive reactions of F atoms with the initial SiCH3 and appeared SiCHxFy (x + y ≀ 3) surface groups

    Evaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulation

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    Experimental measurements of current-voltage relationship in RF CCP discharge in argon atΒ 81Β MHz have been performed by cylindrical Langmuir probes technique. Two different probe radii have been used:Β 50 andΒ 250Β ΞΌm. The high plasma density 1010–1011Β cm-3 has been estimated at specific input power under study. The experimental data on nonmonotonic behavior of probe current with pressure were observed firstly for conditions of RF discharge plasmas. To analyze the probe measurements the fast numerical model for ion current collected by a cylindrical probe has been developed. This model is based on the particle-in-cell with Monte-Carlo collision method for ions motion and Boltzmann relation for electrons. The features of probe data at studied conditions were discussed. The comparative analysis of different collisionless approaches for plasma density calculation from ion probe current is done. It is shown that in general collisionless theories underestimate the plasma density value. For correct evaluation of plasma density experimental I-V probe measurement should be supplied by the numerical simulation. It was demonstrated that the collisionless analytical theory of orbital motion can formally give correct results on plasma density at some plasma conditions even when ion collisions take place. The physical reasons of this accidental validity are explained

    O<SUB>2</SUB> dissociation in plasmas and problems of the O<SUB>2</SUB> cross section set

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    International audienceDC glow discharges in pure O2 in a Pyrex tube were studied to determine dissociation rate constant over a wide range of E/N and thereby to probe O2 dissociation cross section close to threshold. Electric field, E, was found from probe measurements while the gas density, N, from the gas temperature derived from the O2(b1&#61523;g ) &#61614; O2(X3&#61523;g-) emission spectrum. O atom density (as well ratio O/N ratio) was measured by HR TALIF while O/N ratio was also determined by Ar actinometry. Time-resolved actinometry of partially-modulated discharges was used to probe the O loss rate. The O2 dissociation rate constant was determined as a function of E/N, and compared to calculations from different O2 cross section sets. This comparison allowed validation of a the self-consistent cross section set for O2

    Effect of energetic ions on plasma damage of porous SiCOH low-k materials

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    Plasma damage of SiCOH low-k films in an oxygen plasma is studied using a transformer coupled plasma reactor. The concentration of oxygen atoms and O2+ ions is varied by using three different conditions: (1) bottom power only, (2) bottom and top power, and (3) top power only. After plasma exposure, the low-k samples are characterized by various experimental techniques. It is shown that the ion bombardment induced by the bottom power minimizes the plasma damage by increasing the recombination coefficient of oxygen radicals. Contrary to the expectations, the densification of the top surface by ion radiation was limited. The increase in the recombination coefficient is mainly provided by modification of the pore wall surface and creation of chemically active sites stimulating the recombination of oxygen atoms. The results show that a reduction in plasma damage can be achieved without sealing of low-k top surface.status: publishe
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