22 research outputs found

    Verfahren und Vorrichtung zum Erzeugen von insbesondere EUV-Strahlung und/oder weicher Roentgenstrahlung

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    WO2005060321 A UPAB: 20050818 NOVELTY - A plasma (26) is formed by an operating gas (22) in a discharge space (14) comprising a radiation emission window (16) and an electrode system with an anode (18) and a cathode (20). Electrical energy is transmitted to plasma by electrode system using charge carriers (24) made available in the discharge space by introducing the radiation (30) generated by a radiation source (28). DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for device for generating extreme ultraviolet radiation and/or soft X-ray radiation. USE - For generating extreme ultraviolet (EUV) radiation and/or soft X-ray radiation, for use in lithographic process in manufacture of semiconductor. ADVANTAGE - Enables reliable ignition of gas discharge at high repetition frequencies and with longer operating pauses by simple structure
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