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114 research outputs found

Opportunities for microtechnology in metrology

Author: D. Wijngaards
R.F. Wolffenbuttel
Publication venue: 'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
Field of study

The relationship between microsystem technology and metrology

Author: C.J. van Mullem
R.F. Wolffenbuttel
Publication venue: 'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
Field of study

State-of-the-Art in Integrated Optical Microspectrometers

Author: R.F. Wolffenbuttel
Publication venue: 'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
Field of study

Backside-illuminated silicon photodiode array for an integrated spectrometer

Author: P.M. Sarro
R.F. Wolffenbuttel
T.A. Kwa
Publication venue: 'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
Field of study

Effects of plasma etching chemistry and post-processing on the mechanical adhesion and electrical contact of double polysilicon layer structures

Author: P.J. French
R.F. Wolffenbuttel
Yuan Xiong Li
Publication venue: 'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
Field of study

Integrated micromachined electrostatic true RMS-to-DC converter

Author: P. van Drieenhuizen
R.F. Wolffenbuttel
Publication venue: 'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
Field of study

Tri-colorimetric detector in silicon with one photodiode

Author: E.J. Blaauw
G. de Graaf
M.R. Wolffenbuttel
R.F. Wolffenbuttel
Publication venue: 'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
Field of study

Noise performance and chopper frequency in integrated micromachined chopper-detectors in silicon

Author: G. de Graaf
R.F. Wolffenbuttel
Publication venue: 'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
Field of study

Plasma planarization for sensor applications

Author: P.J. French
R.F. Wolffenbuttel
Y.X. Li
Publication venue: 'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
Field of study

Using Dynamic Voltage Drive in a Parallel-Plate Electrostatic Actuator for Full-Gap Travel Range and Positioning

Author: E. Cretu
L.A. Rocha
R.F. Wolffenbuttel
Publication venue: 'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
Field of study

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